UM  > 科技學院  > 機電工程系
Novel design of a totally decoupled flexure-based XYZ parallel micropositioning stage
Xu Q.; Li Y.
2010-12-01
Conference NameIEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)
Source PublicationIEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
Pages866-871
Conference DateJUL 06-09, 2010
Conference PlaceMontreal, CANADA
Abstract

This paper presents the design process of a totally decoupled flexure-based XYZ compliant parallel-kinematics micropositioning stage. The uniqueness of the proposed XYZ stage lies in that it consists of three monolithic limbs and has both input and output decoupling properties. The output decoupling is allowed by the employment of a proposed 2-D compound parallelogram flexure, and the input decoupling is implemented by actuation isolation which is enabled by the double compound parallelogram flexures with large transverse stiffness. By modeling each flexure hinge as a 2-DOF compliant joint, analytical models for the amplification ratio and input stiffness of the XYZ stage are established, which are validated by finite element analysis performed with ANSYS. The presented results are useful for the development of a new XYZ micropositioning stage for the micro-/nanomanipulation applications. © 2010 IEEE.

DOI10.1109/AIM.2010.5695732
URLView the original
Indexed BySCI
WOS Research AreaComputer Science ; Engineering ; Robotics
WOS SubjectComputer Science, Artificial Intelligence ; Engineering, Electrical & Electronic ; Robotics
WOS IDWOS:000312904200145
Fulltext Access
Citation statistics
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Xu Q.,Li Y.. Novel design of a totally decoupled flexure-based XYZ parallel micropositioning stage[C],2010:866-871.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Xu Q.]'s Articles
[Li Y.]'s Articles
Baidu academic
Similar articles in Baidu academic
[Xu Q.]'s Articles
[Li Y.]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Xu Q.]'s Articles
[Li Y.]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.