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Modeling and control of rate-dependent hysteresis for a piezo-driven micropositioning stage
Xu Q.; Li Y.
Conference NameIEEE International Conference on Robotics and Automation (ICRA)
Source PublicationProceedings - IEEE International Conference on Robotics and Automation
Conference DateMAY 09-13, 2011
Conference PlaceShanghai, PEOPLES R CHINA

Piezoelectric hysteresis usually relies on the frequency of the input signal. Most of the existing rate-dependent models use a lot of parameters to capture the rate-dependent hysteresis. In this paper, a simple rate-dependent hysteresis model is proposed to describe the frequency dependency effect of a micropositioning stage driven by piezoelectric actuators. This model is extended from an enhanced Coleman-Hodgdon (C-H) model. It has only 9 parameters and exhibits an accuracy better than 97%. The dependencies of the model parameters on the input rate are derived based on open-loop experimental tests. As inverse rate-dependent C-H model is established to construct a feedforward compensation. Experimental results demonstrate the effectiveness of the rate-dependent model over the traditional rate-independent one. The feedforward in conjunction with a PID feedback control is constructed to further attenuate the modeling errors and creep effects. Results show that the combined control scheme suppresses the tracking error by more than 8 times compared to the stand-alone PID control. It provides a sound base of practical control of the micropositioning system for micro/nano scale manipulation. © 2011 IEEE.

URLView the original
Indexed BySCI
WOS Research AreaAutomation & Control Systems ; Engineering ; Robotics
WOS SubjectAutomation & Control Systems ; Engineering, Electrical & Electronic ; Robotics
WOS IDWOS:000324383400130
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Citation statistics
Cited Times [WOS]:7   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Xu Q.,Li Y.. Modeling and control of rate-dependent hysteresis for a piezo-driven micropositioning stage[C],2011:1670-1675.
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