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Design and optimization of a long-stroke compliant micropositioning stage driven by voice coil motor
Lin S.; Jia Y.; Lei I.P.; Xu Q.
2012-12-01
Conference Name12th International Conference on Control, Automation, Robotics and Vision (ICARCV)
Source Publication2012 12th International Conference on Control, Automation, Robotics and Vision, ICARCV 2012
Pages1716-1721
Conference DateDEC 05-07, 2012
Conference PlaceGuangzhou, PEOPLES R CHINA
Abstract

A micro-/nanopositioning system with both large motion range and compact size is highly desired in various precision engineering applications. In this paper, the design of a new compliant micropositioning stage with translational motion is proposed based on flexure mechanisms. The stage parameters are optimized by using the genetic algorithm (GA) to achieve a large natural frequency under the constraints on motion range (i.e., over 10 mm) and compact physical dimension along with a high safety factor for the material. Both analytical calculations and simulations based on finite element analysis are performed to validate the stage performances. A physical prototype system which employs a voice coil motor and a laser displacement sensor for actuation and sensing, respectively, is fabricated for experimental tests. Result confirms the long-stroke performance of the developed micropositioning system. © 2012 IEEE.

KeywordFlexure Mechanisms Long-stroke Micropositioning Optimization Single Axis
DOI10.1109/ICARCV.2012.6485408
URLView the original
Indexed BySCI
WOS Research AreaAutomation & Control Systems ; Engineering ; Robotics
WOS SubjectAutomation & Control Systems ; Engineering, Electrical & Electronic ; Robotics
WOS IDWOS:000317972500299
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被引频次[WOS]:5   [WOS记录]     [WOS相关记录]
Document TypeConference paper
专题DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
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Lin S.,Jia Y.,Lei I.P.,et al. Design and optimization of a long-stroke compliant micropositioning stage driven by voice coil motor[C],2012:1716-1721.
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