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A modular two-axis compliant parallel micropositioning stage with long travel range
Xu Q.
2013-12-01
Conference NameIEEE International Conference on Information and Automation (ICIA)
Source Publication2013 IEEE International Conference on Information and Automation, ICIA 2013
Pages898-903
Conference DateAUG 26-28, 2013
Conference PlaceYinchuan, PEOPLES R CHINA
Abstract

Micropositioning systems with the properties of long travel range, compact physical size and high accuracy are required in many precision engineering applications. This paper presents the design, fabrication and testing of a novel two-axis compliant parallel-kinematics precision positioning stage with a centimeter stroke and compact size. Different from existing work, the presented stage owns a much compact dimension which is enabled by a concept of modular design. The proposed compact design permits positioning applications inside a constrained space. The stage performances in terms of motion range, stiffness and resonant frequency are verified through finite element analysis with simulations. A prototype is fabricated by using voice coil motors and laser displacement sensors for driving and sensing, respectively. Experimental results show that the stage is capable of submicron-resolution positioning with a range over 11 mm in each axis. Moreover, the stage exhibits negligible static and dynamic crosstalks, which are better than 0.75% and -33 dB, respectively. © 2013 IEEE.

KeywordCompliant Mechanisms Flexure Mechanisms Mechanism Design Precision Positioning
DOI10.1109/ICInfA.2013.6720421
URLView the original
Indexed BySCI
WOS Research AreaAutomation & Control Systems ; Engineering
WOS SubjectAutomation & Control Systems ; Engineering, Electrical & Electronic
WOS IDWOS:000346483800162
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Cited Times [WOS]:4   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
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Xu Q.. A modular two-axis compliant parallel micropositioning stage with long travel range[C],2013:898-903.
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