UM  > 科技學院  > 機電工程系
A modular two-axis compliant parallel micropositioning stage with long travel range
Xu Q.
Conference NameIEEE International Conference on Information and Automation (ICIA)
Source Publication2013 IEEE International Conference on Information and Automation, ICIA 2013
Conference DateAUG 26-28, 2013
Conference PlaceYinchuan, PEOPLES R CHINA

Micropositioning systems with the properties of long travel range, compact physical size and high accuracy are required in many precision engineering applications. This paper presents the design, fabrication and testing of a novel two-axis compliant parallel-kinematics precision positioning stage with a centimeter stroke and compact size. Different from existing work, the presented stage owns a much compact dimension which is enabled by a concept of modular design. The proposed compact design permits positioning applications inside a constrained space. The stage performances in terms of motion range, stiffness and resonant frequency are verified through finite element analysis with simulations. A prototype is fabricated by using voice coil motors and laser displacement sensors for driving and sensing, respectively. Experimental results show that the stage is capable of submicron-resolution positioning with a range over 11 mm in each axis. Moreover, the stage exhibits negligible static and dynamic crosstalks, which are better than 0.75% and -33 dB, respectively. © 2013 IEEE.

KeywordCompliant Mechanisms Flexure Mechanisms Mechanism Design Precision Positioning
URLView the original
Indexed BySCI
WOS Research AreaAutomation & Control Systems ; Engineering
WOS SubjectAutomation & Control Systems ; Engineering, Electrical & Electronic
WOS IDWOS:000346483800162
Fulltext Access
Citation statistics
Cited Times [WOS]:4   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Xu Q.. A modular two-axis compliant parallel micropositioning stage with long travel range[C],2013:898-903.
Related Services
Recommend this item
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Xu Q.]'s Articles
Baidu academic
Similar articles in Baidu academic
[Xu Q.]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Xu Q.]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.