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A novel compliant micropositioning stage with dual ranges and resolutions
Xu Q.
2014
Source PublicationSensors and Actuators, A: Physical
ISSN09244247
Volume205Pages:6-14
Abstract

Dual-range stages are demanded in precision positioning applications that call for fine resolution in a smaller motion range and coarse resolution in a larger range. Traditional dual-range stages are realized using two actuators, which complicates the mechanism and control design procedures. This paper presents the design and testing of a novel dual-range, dual-resolution precision positioning stage driven by a single linear actuator. The stage structure is devised with leaf flexures to achieve a large stroke. Strain sensors are employed to provide different resolutions in the two motion ranges. To quantify the design of the motion ranges and fine/coarse resolution ratio, analytical models are established and verified through finite element analysis simulations. A proof-of-concept prototype is fabricated for experimental investigations and the experimental results validate the effectiveness of the proposed design. The reported ideas can also be extended to the design of multi-axis micropositioning stages. © 2013 Elsevier B.V.

KeywordCompliant Mechanisms Flexure Hinges Mechanism Design Micropositioning Precision Engineering
DOI10.1016/j.sna.2013.10.010
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering ; Instruments & Instrumentation
WOS SubjectEngineering, Electrical & Electronic ; Instruments & Instrumentation
WOS IDWOS:000330747500002
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Cited Times [WOS]:18   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Xu Q.. A novel compliant micropositioning stage with dual ranges and resolutions[J]. Sensors and Actuators, A: Physical,2014,205:6-14.
APA Xu Q..(2014).A novel compliant micropositioning stage with dual ranges and resolutions.Sensors and Actuators, A: Physical,205,6-14.
MLA Xu Q.."A novel compliant micropositioning stage with dual ranges and resolutions".Sensors and Actuators, A: Physical 205(2014):6-14.
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