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Design and testing of a novel multi-stroke micropositioning system with variable resolutions
Xu Q.
2014-02-01
Source PublicationReview of Scientific Instruments
ISSN00346748 10897623
Volume85Issue:2
Abstract

Multi-stroke stages are demanded in micro-/nanopositioning applications which require smaller and larger motion strokes with fine and coarse resolutions, respectively. This paper presents the conceptual design of a novel multi-stroke, multi-resolution micropositioning stage driven by a single actuator for each working axis. It eliminates the issue of the interference among different drives, which resides in conventional multi-actuation stages. The stage is devised based on a fully compliant variable stiffness mechanism, which exhibits unequal stiffnesses in different strokes. Resistive strain sensors are employed to offer variable position resolutions in the different strokes. To quantify the design of the motion strokes and coarse/fine resolution ratio, analytical models are established. These models are verified through finite-element analysis simulations. A proof-of-concept prototype XY stage is designed, fabricated, and tested to demonstrate the feasibility of the presented ideas. Experimental results of static and dynamic testing validate the effectiveness of the proposed design. © 2014 AIP Publishing LLC.

DOI10.1063/1.4866475
URLView the original
Indexed BySCI
WOS Research AreaInstruments & Instrumentation ; Physics
WOS SubjectInstruments & Instrumentation ; Physics, Applied
WOS IDWOS:000335919900288
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被引频次[WOS]:16   [WOS记录]     [WOS相关记录]
Document TypeJournal article
专题DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
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Xu Q.. Design and testing of a novel multi-stroke micropositioning system with variable resolutions[J]. Review of Scientific Instruments,2014,85(2).
APA Xu Q..(2014).Design and testing of a novel multi-stroke micropositioning system with variable resolutions.Review of Scientific Instruments,85(2).
MLA Xu Q.."Design and testing of a novel multi-stroke micropositioning system with variable resolutions".Review of Scientific Instruments 85.2(2014).
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