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Precision control of piezoelectric actuator using fuzzy feedback control with inverse hysteresis compensation
Chi Z.; Xu Q.
2015
Conference NameIEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Source Publication2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
Pages219-224
Conference DateAPR 07-11, 2015
Conference PlaceXian, PEOPLES R CHINA
Abstract

Piezoelectric actuators are widely employed in nanopositioning applications. The main drawback of piezoelectric actuator is the hysteresis characteristics. This paper presents the precision control of the output displacement for a piezoelectric actuator through fuzzy feedback control combined with inverse model-based feedforward compensation. Firstly, the Preisach model is established to describe the hysteresis of piezoelectric actuator. Then, a feedforward compensator is designed using an input correction iteration algorithm. Afterwards, three kinds of fuzzy control methods including fuzzy control, two-input fuzzy PID control, and three-input fuzzy PID control are designed and realized, and numerical simulation experiments are carried out, respectively. Through a comparative study of the numerical results, the advantages and disadvantages of each kind of fuzzy control method are disclosed.

KeywordFeedforward Compensation Fuzzy Control Hysteresis Characteristics Piezoelectric Actuator Preisach Model
DOI10.1109/NEMS.2015.7147414
URLView the original
Indexed BySCI
Language英语
WOS Research AreaScience & Technology - Other Topics ; Instruments & Instrumentation
WOS SubjectNanoscience & Nanotechnology ; Instruments & Instrumentation
WOS IDWOS:000380505700056
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Cited Times [WOS]:2   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Chi Z.,Xu Q.. Precision control of piezoelectric actuator using fuzzy feedback control with inverse hysteresis compensation[C],2015:219-224.
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