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Design of a new flexure-based XYZ parallel nanopositioning stage
Zhang X.; Xu Q.
2015
Conference NameIEEE International Conference on Robotics and Biomimetics (ROBIO)
Source Publication2015 IEEE International Conference on Robotics and Biomimetics, IEEE-ROBIO 2015
Pages1962-1966
Conference DateDEC 06-09, 2015
Conference PlaceZhuhai, PEOPLES R CHINA
Abstract

This paper concentrates on the mechanism design of a new compact parallel flexure stage with three DOFs. First of all, a bridge-principle amplifier is proposed by a serial connection of two fundamental bridge amplifiers. Then, an analytical study of amplifiers in terms of two-stage amplifiers is conducted by performing finite-element analysis (FEA) simulations. Later, a PPR flexure joint is demonstrated to reduce the cross-axis error. Owing to a larger amplification ratio and flexures, the two-stage amplifier is then employed to devise an XYZ parallel stage with decoupled motion. Driven by three low-voltage piezoelectric stacks, the XYZ stage provides larger decoupled motions by using the two-stacked amplifiers, which directly connect the actuators and output platform with the PPR joints. The performance of the designed stage is verified by FEA simulation study.

Keyword3-dof Nanopositioning Stage Decoupling Fea Simulation Ppr Joint Two-stacked Amplifier
DOI10.1109/ROBIO.2015.7419060
URLView the original
Indexed BySCI
WOS Research AreaRobotics
WOS SubjectRobotics
WOS IDWOS:000380476200327
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Citation statistics
Cited Times [WOS]:6   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Zhang X.,Xu Q.. Design of a new flexure-based XYZ parallel nanopositioning stage[C],2015:1962-1966.
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