UM  > 科技學院  > 機電工程系
Design of a new flexure-based XYZ parallel nanopositioning stage
Zhang X.; Xu Q.
Conference NameIEEE International Conference on Robotics and Biomimetics (ROBIO)
Source Publication2015 IEEE International Conference on Robotics and Biomimetics, IEEE-ROBIO 2015
Conference DateDEC 06-09, 2015
Conference PlaceZhuhai, PEOPLES R CHINA

This paper concentrates on the mechanism design of a new compact parallel flexure stage with three DOFs. First of all, a bridge-principle amplifier is proposed by a serial connection of two fundamental bridge amplifiers. Then, an analytical study of amplifiers in terms of two-stage amplifiers is conducted by performing finite-element analysis (FEA) simulations. Later, a PPR flexure joint is demonstrated to reduce the cross-axis error. Owing to a larger amplification ratio and flexures, the two-stage amplifier is then employed to devise an XYZ parallel stage with decoupled motion. Driven by three low-voltage piezoelectric stacks, the XYZ stage provides larger decoupled motions by using the two-stacked amplifiers, which directly connect the actuators and output platform with the PPR joints. The performance of the designed stage is verified by FEA simulation study.

Keyword3-dof Nanopositioning Stage Decoupling Fea Simulation Ppr Joint Two-stacked Amplifier
URLView the original
Indexed BySCI
WOS Research AreaRobotics
WOS SubjectRobotics
WOS IDWOS:000380476200327
Fulltext Access
Citation statistics
Cited Times [WOS]:6   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Zhang X.,Xu Q.. Design of a new flexure-based XYZ parallel nanopositioning stage[C],2015:1962-1966.
Related Services
Recommend this item
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Zhang X.]'s Articles
[Xu Q.]'s Articles
Baidu academic
Similar articles in Baidu academic
[Zhang X.]'s Articles
[Xu Q.]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Zhang X.]'s Articles
[Xu Q.]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.