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Parallel-kinematic nanopositioning stages based on roberts mechanism
Wan S.; Xu Q.
2015
Source PublicationNanopositioning Technologies: Fundamentals and Applications
PublisherSpringer, Cham
Pages123-150
Abstract

This chapter presents the design of parallel-kinematic nanopositioning stages with large workspace and low crosstalk. Based on compliant Roberts mechanism, the design of multi-axis parallel compliant stage is synthesized. A new XY nanopositioning stage is studied in detail. Pseudo-rigid-body model (PRBM) is developed to build the quantitative models of the compliant Roberts mechanisms. In addition, finite-element analysis (FEA) is carried out to validate its performance. A prototype is fabricated and tested through experimental studies. Results show that the XY stage delivers a work range larger than 12mm in each axis. Moreover, the parasitic motion of the stage in the non-working direction is less than 1.7% of the motion stroke. It indicates that the designed stage meets the requirements of a large stroke and high precision linear guiding mechanism, which demonstrates the feasibility of the proposed design ideas using the Roberts mechanism. Moreover, a feedback control using PID control algorithm is implemented to demonstrate the positioning performance of the developed XY stage. The reported ideas can also be extended to the design and control of other types of micro-/nanopositioning systems.

DOI10.1007/978-3-319-23853-1_4
URLView the original
ISBN9783319238531;9783319238524;
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Citation statistics
Document TypeBook chapter
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Wan S.,Xu Q.. Parallel-kinematic nanopositioning stages based on roberts mechanism:Springer, Cham,2015:123-150.
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