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Design of a new 5-DOF flexure-based nanopositioning stage
Zhang X.; Xu Q.
2015
Conference NameIEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Source Publication2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
Pages276-280
Conference DateAPR 07-11, 2015
Conference PlaceXian, PEOPLES R CHINA
Abstract

In this paper, the design of a new compliant five-axis parallel nanopositioning stage driven by PZT actuators is presented, which is based on flexure mechanism. The flexure stage contains two kinds of displacement amplifiers based on simple lever principle and bridge principle, respectively. The lever structure is designed to meet the requirement of the change of direction of the output displacement. The double-bridge amplifier can achieve the large displacement by overcoming the stroke limitation of the actuator. Each pair of actuators realizes the translational displacement in one axis and the rotation in one plane. The flexure stage with three pairs of actuators can obtain 5-DOF motion as the rotation in XY-plane is redundant. FEA simulation is conducted to verify the dimension of the designed stage. Results demonstrate the performance of the designed multi-axis nanopositioning stage.

KeywordCompliant Mechanism Flexure Mechanism Nanopositioning Piezoelectric Actuation
DOI10.1109/NEMS.2015.7147426
URLView the original
Indexed BySCI
WOS Research AreaScience & Technology - Other Topics ; Instruments & Instrumentation
WOS SubjectNanoscience & Nanotechnology ; Instruments & Instrumentation
WOS IDWOS:000380505700068
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被引频次[WOS]:1   [WOS记录]     [WOS相关记录]
Document TypeConference paper
专题DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
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Zhang X.,Xu Q.. Design of a new 5-DOF flexure-based nanopositioning stage[C],2015:276-280.
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