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Mechanism design of a compact XYZ parallel flexure stage
Zhang X.; Xu Q.
Conference NameIEEE International Conference on Information and Automation 2015
Source Publication2015 IEEE International Conference on Information and Automation, ICIA 2015 - In conjunction with 2015 IEEE International Conference on Automation and Logistics
Conference DateAUG 08-10, 2015
Conference PlaceLijiang, PEOPLES R CHINA

This paper reports on the mechanism design of a compact XYZ parallel flexure sage. First, a new bridge-principle amplifier is proposed by a serial connection of two fundamental bridge amplifiers. Then, a comparison study of three displacement amplifiers in terms of one-stage, two-stage, and three-stage amplifiers is conducted by performing finite-element analysis (FEA) simulations. Owing to a larger amplification ratio, the two-stage amplifier is then employed to devise an XYZ parallel stage with decoupled motion. The stage is driven by three PZTs. By connecting the actuators with flexure output platform using the amplifiers, an XYZ stage with decoupled motions in X, Y and Z axes is obtained. The performance of the designed stage is verified by carrying out several FEA simulation studies.

KeywordDecouple Fea Simulation Flexure Hinge Two-stage Amplifier Xyz Nano-positioning Stage
URLView the original
Indexed BySCI
WOS Research AreaAutomation & Control Systems ; Engineering
WOS SubjectAutomation & Control Systems ; Engineering, Electrical & Electronic
WOS IDWOS:000380562200176
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Cited Times [WOS]:2   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Zhang X.,Xu Q.. Mechanism design of a compact XYZ parallel flexure stage[C],2015:953-957.
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