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Design and analysis of a new compliant XY micropositioning stage based on Roberts mechanism
Wan S.; Xu Q.
2016
Source PublicationMechanism and Machine Theory
ISSN0094114X
Volume95Pages:125-139
Abstract

The demand for a compliant micropositioning stage with a large workspace and high precision is increasing. This paper presents a new design of XY micropositioning stage based on Roberts mechanism, which is a traditional linear guiding mechanism. By extending the traditional rigid-body Roberts mechanism, two kinds of new compliant guiding mechanisms are designed and a novel parallel-kinematic XY compliant guiding stage is synthesized. Pseudo-rigid-body model (PRBM) is developed to build the quantitative models of the compliant Roberts mechanisms. In addition, finite-element analysis (FEA) is carried out to validate its performance. A prototype is fabricated and tested through experimental studies. Results show that the XY stage delivers a work range larger than 12 mm in each axis. Moreover, the parasitic motion of the stage in the non-working direction is less than 1.7% of the motion stroke. It indicates that the designed stage meets the requirements of a large stroke and high precision linear guiding mechanism, which demonstrates the feasibility of the proposed design ideas using the Roberts mechanism.

KeywordCompliant Mechanism Micropositioning Pseudo Rigid Body Model (Prbm) Roberts Mechanisms Xy Stage
DOI10.1016/j.mechmachtheory.2015.09.003
URLView the original
Language英语
WOS Research AreaEngineering
WOS SubjectEngineering, Mechanical
WOS IDWOS:000363266400010
PublisherPERGAMON-ELSEVIER SCIENCE LTD, THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, ENGLAND
Fulltext Access
Citation statistics
Cited Times [WOS]:19   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Wan S.,Xu Q.. Design and analysis of a new compliant XY micropositioning stage based on Roberts mechanism[J]. Mechanism and Machine Theory,2016,95:125-139.
APA Wan S.,&Xu Q..(2016).Design and analysis of a new compliant XY micropositioning stage based on Roberts mechanism.Mechanism and Machine Theory,95,125-139.
MLA Wan S.,et al."Design and analysis of a new compliant XY micropositioning stage based on Roberts mechanism".Mechanism and Machine Theory 95(2016):125-139.
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