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Design and simulation a MEMS microgripper with integrated electrothermal actuator and force sensor
Yang S.; Xu Q.
2016-10-21
Conference Name2016 International Conference on Advanced Robotics and Mechatronics (ICARM)
Source PublicationICARM 2016 - 2016 International Conference on Advanced Robotics and Mechatronics
Pages271-276
Conference Date18-20 Aug. 2016
Conference PlaceMacau, China
Abstract

The conceptual design of a novel compliant microelectromechanical systems (MEMS)-based gripper equipped with elecrothermal actuating as well as electrothermal force sensing is introduced in this paper. By this design combination, the device possesses some unique characteristics including a small and compact footprint size, and a large and steady force from the thermal actuator. Simulation results show that the thermal actuator produces the gripping force to execute the gripping operation with a range of approximately 85 μm under a low source voltage of 2 V. At the same time, owning to a compliant rotation bearing, a large displacement of gripping range is obtained. The established theoretical models have a coincident matching with the FEA simulation results, which verifies the feasible design of the gripper in this work.

DOI10.1109/ICARM.2016.7606931
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering ; Robotics
WOS SubjectEngineering, Electrical & Electronic ; Robotics
WOS IDWOS:000386653600047
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Citation statistics
Cited Times [WOS]:2   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Yang S.,Xu Q.. Design and simulation a MEMS microgripper with integrated electrothermal actuator and force sensor[C],2016:271-276.
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