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Design of a flexure-based micro-motion stage with constant output force
Wang P.; Xu Q.
2017-07-21
Conference Name2017 IEEE International Conference on Robotics and Automation (ICRA)
Source PublicationProceedings - IEEE International Conference on Robotics and Automation
Pages2994-2999
Conference Date29 May-3 June 2017
Conference PlaceSingapore, Singapore
Abstract

This paper presents the design of a flexure-based precision positioning micro-motion stage system with constant output force. The stage mechanism is devised using folded leaf flexure (FLF) to achieve positive-stiffness structure. Bistable beams are employed to design negative-stiffness structure by using their buckling characteristics. Two bistable beams and two FLFs are combined together as a zero-stiffness structure. Complete models of the amplifier and the zero-stiffness structure are established and verified by using finite element analysis (FEA) simulation. The structural parameters are carefully designed to guarantee the performance requirement of motion range, stiffness and driving force. A prototype stage is fabricated by 3D printing process and a series of experiments are conducted for performance testing. Experimental results show that the developed positioning stage delivers a reachable constant-force motion range of 138 μm with good motion repeatability.

KeywordCompliant Mechanisms Constant Force Micro-/nanopositioining Micro-motion Stage Zero Stiffness
DOI10.1109/ICRA.2017.7989343
URLView the original
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Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Wang P.,Xu Q.. Design of a flexure-based micro-motion stage with constant output force[C],2017:2994-2999.
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