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Design and modeling of a novel 3-PSS flexure nanopositioning stage
Zhang X.; Xu Q.
2017-08-21
Conference Name2017 IEEE International Conference on Advanced Intelligent Mechatronics (AIM)
Source PublicationIEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM
Pages1322-1327
Conference Date3-7 July 2017
Conference PlaceMunich, Germany
Abstract

This paper presents the mechanical design of a novel 3-PSS (P and S represent the prismatic and spherical joints, respectively) parallel-kinematic flexure nanopositioning stage. This stage provides a high-precision motion driven by three piezoelectric actuators. By employing the compound displacement amplifier and 3-PSS parallel mechanism, the flexure nanopositioning stage can deliver two rotational degree-of-freedom (DOF) and one translational DOF. Statics modeling and dynamics analysis of the nanopositioning stage are carried out to evaluate the performance of the stage. To verify the accuracy of the analytical modeling, simulation studies with finite element analysis (FEA) are carried out. Results demonstrate the promising performance of the designed spatial nanopositioning stage for dexterous micromanipulation applications.

DOI10.1109/AIM.2017.8014201
URLView the original
Indexed BySCI
WOS Research AreaEngineering ; Robotics
WOS SubjectEngineering, Electrical & Electronic ; Robotics
WOS IDWOS:000426448500217
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Cited Times [WOS]:2   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Zhang X.,Xu Q.. Design and modeling of a novel 3-PSS flexure nanopositioning stage[C],2017:1322-1327.
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