Design and optimization of a compact XY parallel micro/nano-positioning stage with stacked structure | |
Wu Z.; Xu Q.![]() | |
2018-01-29 | |
Conference Name | 2017 2nd International Conference on Advanced Robotics and Mechatronics (ICARM) |
Source Publication | 2017 2nd International Conference on Advanced Robotics and Mechatronics, ICARM 2017 |
Volume | 2018-January |
Pages | 558-563 |
Conference Date | 27-31 Aug. 2017 |
Conference Place | Hefei, China |
Abstract | This paper introduces the design and optimization of a new piezo-driven compact XY parallel stage for micro/nano-positioning applications. The compact parallel stage is developed with a stacked design. A displacement amplifier is adopted to amplify the stroke of piezo actuator. The amplifier is then improved and integrated with the decoupler to isolate the two actuators. The main design variables of the stage are optimized by applying a genetic algorithm based on finite-element analysis (FEA) for achieving the required performance. The designed stage is then further improved to enhance the stage's performance. The performance of the proposed XY precision stage is verified by performing FEA simulation studies. |
Keyword | Fea Analysis Mechanism Design Micro/nano-positioning Parameter Optimization Stacked Structure |
DOI | 10.1109/ICARM.2017.8273223 |
URL | View the original |
Indexed By | SCI |
WOS Research Area | Automation & Control Systems ; Engineering ; Robotics |
WOS Subject | Automation & Control Systems ; Engineering, Electrical & Electronic ; Engineering, Mechanical ; Robotics |
WOS ID | WOS:000426453700099 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Affiliation | Universidade de Macau |
Recommended Citation GB/T 7714 | Wu Z.,Xu Q.. Design and optimization of a compact XY parallel micro/nano-positioning stage with stacked structure[C],2018:558-563. |
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