UM  > Faculty of Science and Technology  > DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Design and optimization of a compact XY parallel micro/nano-positioning stage with stacked structure
Wu Z.; Xu Q.
2018-01-29
Conference Name2017 2nd International Conference on Advanced Robotics and Mechatronics (ICARM)
Source Publication2017 2nd International Conference on Advanced Robotics and Mechatronics, ICARM 2017
Volume2018-January
Pages558-563
Conference Date27-31 Aug. 2017
Conference PlaceHefei, China
Abstract

This paper introduces the design and optimization of a new piezo-driven compact XY parallel stage for micro/nano-positioning applications. The compact parallel stage is developed with a stacked design. A displacement amplifier is adopted to amplify the stroke of piezo actuator. The amplifier is then improved and integrated with the decoupler to isolate the two actuators. The main design variables of the stage are optimized by applying a genetic algorithm based on finite-element analysis (FEA) for achieving the required performance. The designed stage is then further improved to enhance the stage's performance. The performance of the proposed XY precision stage is verified by performing FEA simulation studies.

KeywordFea Analysis Mechanism Design Micro/nano-positioning Parameter Optimization Stacked Structure
DOI10.1109/ICARM.2017.8273223
URLView the original
Indexed BySCI
WOS Research AreaAutomation & Control Systems ; Engineering ; Robotics
WOS SubjectAutomation & Control Systems ; Engineering, Electrical & Electronic ; Engineering, Mechanical ; Robotics
WOS IDWOS:000426453700099
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Cited Times [WOS]:1   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversidade de Macau
Recommended Citation
GB/T 7714
Wu Z.,Xu Q.. Design and optimization of a compact XY parallel micro/nano-positioning stage with stacked structure[C],2018:558-563.
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