Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage | |
Zhang, Xiaozhi; Xu, Qingsong![]() | |
2018-12 | |
Source Publication | ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING
![]() |
ISSN | 0736-5845 |
Volume | 54Pages:162-172 |
Abstract | Limited travel stroke constrains the application of existing XYZ parallel micro/nano-positioning stages. In this paper, a novel parallel-kinematic symmetrical micro/nano-positioning stage is proposed to enlarge the travel range with a compact physical size. For a large-stroke parallel stage, the cross-axis motion increases the difficulty of closed-loop control process. The motions of the parallel stage on different axes are decoupled by employing I shaped flexure hinges in this work. In order to obtain a large input displacement for actuating the stage, three voice coil motors (VCM) are adopted. In view of the lower output force of the VCM, the guiding flexure mechanism is designed with an optimized cross-sectional dimension. To verify the performance of the stage, analytical modeling and simulation study are carried out. A prototype stage is fabricated for experimental studies. Results show that the designed parallel micro/nano-positioning stage owns a three-degree-of-freedom motion workspace of 2.22 mm x 2.22 mm x 1.81 mm with an overall size of 176 mm x 176 mm x 198 mm, which is more compact than existing symmetrical designs containing the actuators. Moreover, the symmetrical design enables a low crosstalk of 1.7% among the three working axes. (C) 2017 Elsevier Ltd. All rights reserved. |
Keyword | Flexure Mechanism Parallel Mechanism Motion Decoupling Large Stroke Voice Coil Motor |
DOI | 10.1016/j.rcim.2017.11.006 |
URL | View the original |
Indexed By | SCI |
Language | 英语 |
WOS Research Area | Computer Science ; Engineering ; Robotics |
WOS Subject | Computer Science, Interdisciplinary Applications ; Engineering, Manufacturing ; Robotics |
WOS ID | WOS:000441486900013 |
Publisher | PERGAMON-ELSEVIER SCIENCE LTD |
The Source to Article | WOS |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Affiliation | Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China |
First Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Zhang, Xiaozhi,Xu, Qingsong. Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage[J]. ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING,2018,54:162-172. |
APA | Zhang, Xiaozhi,&Xu, Qingsong.(2018).Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage.ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING,54,162-172. |
MLA | Zhang, Xiaozhi,et al."Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage".ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING 54(2018):162-172. |
Files in This Item: | There are no files associated with this item. |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment