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Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage
Zhang, Xiaozhi; Xu, Qingsong
2018-12
Source PublicationROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING
ISSN0736-5845
Volume54Pages:162-172
Abstract

Limited travel stroke constrains the application of existing XYZ parallel micro/nano-positioning stages. In this paper, a novel parallel-kinematic symmetrical micro/nano-positioning stage is proposed to enlarge the travel range with a compact physical size. For a large-stroke parallel stage, the cross-axis motion increases the difficulty of closed-loop control process. The motions of the parallel stage on different axes are decoupled by employing I shaped flexure hinges in this work. In order to obtain a large input displacement for actuating the stage, three voice coil motors (VCM) are adopted. In view of the lower output force of the VCM, the guiding flexure mechanism is designed with an optimized cross-sectional dimension. To verify the performance of the stage, analytical modeling and simulation study are carried out. A prototype stage is fabricated for experimental studies. Results show that the designed parallel micro/nano-positioning stage owns a three-degree-of-freedom motion workspace of 2.22 mm x 2.22 mm x 1.81 mm with an overall size of 176 mm x 176 mm x 198 mm, which is more compact than existing symmetrical designs containing the actuators. Moreover, the symmetrical design enables a low crosstalk of 1.7% among the three working axes. (C) 2017 Elsevier Ltd. All rights reserved.

KeywordFlexure Mechanism Parallel Mechanism Motion Decoupling Large Stroke Voice Coil Motor
DOI10.1016/j.rcim.2017.11.006
URLView the original
Indexed BySCI
Language英语
WOS Research AreaComputer Science ; Engineering ; Robotics
WOS SubjectComputer Science, Interdisciplinary Applications ; Engineering, Manufacturing ; Robotics
WOS IDWOS:000441486900013
PublisherPERGAMON-ELSEVIER SCIENCE LTD
The Source to ArticleWOS
Fulltext Access
Citation statistics
Cited Times [WOS]:6   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China
First Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Zhang, Xiaozhi,Xu, Qingsong. Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage[J]. ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING,2018,54:162-172.
APA Zhang, Xiaozhi,&Xu, Qingsong.(2018).Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage.ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING,54,162-172.
MLA Zhang, Xiaozhi,et al."Design, fabrication and testing of a novel symmetrical 3-DOF large-stroke parallel micro/nano-positioning stage".ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING 54(2018):162-172.
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