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Design and analysis of a new XYZ parallel flexure stage
Zhang, Xiaozhi; Xu, Qingsong
2015
Conference Name14th International Federation for the Promotion of Mechanism and Machine Science World Congress, IFToMM 2015
Source Publication2015 IFToMM World Congress Proceedings, IFToMM 2015
Conference Date10 25, 2015 - 10 30, 2015
Conference PlaceTaipei, Taiwan
Author of SourceNational Taiwan University
AbstractIn this paper, the design of a new compliant XYZ totally decoupled parallel-kinematic nanopositioning stage based on flexure mechanism is presented, which is driven by PZT actuators. The output of the flexure stage is enlarged by a compound amplifier of three order based on bridge principle with the amplification ratio of As3 which is larger than the ratio of As for one simple amplifier. The three-dimensional amplifier can overcome the shortage of the displacement limitation of the actuator. The flexure stage with three actuators can obtain the motion along X, Y and Z axes with cross-axis errors less than 1% and the natural frequency larger than 100 Hz. In order to verify the dimension of the objective stage simulation GA method is conducted. FEA simulation results demonstrate the performance of the designed multi-axis nanopositioning stage.
DOI10.6567/IFToMM.14TH.WC.OS3.034
Language英语
Fulltext Access
Citation statistics
Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniversity of Macau, China
First Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Zhang, Xiaozhi,Xu, Qingsong. Design and analysis of a new XYZ parallel flexure stage[C]//National Taiwan University,2015.
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