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Design of a large-range compliant rotary micropositioning stage with angle and torque sensing
Xu Q.
2015
Source PublicationIEEE Sensors Journal
ISSN1530437X
Volume15Issue:4Pages:2419
Abstract

This paper presents the design, modeling, and experimental testing of a flexure-based compliant rotary micropositioning stage with a large rotational range. The rotary stage is devised based on multistage compound radial flexures. One uniqueness lies in that it owns both a compact size and a large rotary stroke. Dominant parameters of the stage are determined based on established analytical models to cater for the requirements on rotational angle and driving torque. These models are verified by conducting finite-element analysis simulations, which also demonstrate the stage performance. A prototype rotary stage is developed using a rotary voice coil motor. A strain-gauge sensor is designed to measure both rotational angle and experienced torque of the rotary stage. The sensitivities of the two-role sensor are derived analytically and calibrated experimentally. Results show that the developed stage is capable of rotary positioning with a resolution of 20μ rad over the range of 10° under an approximately infinite fatigue-life, while keeping a compact physical size. The torque sensor exhibits a resolution of 0.128 mN-m with a measuring range of 1.23 N-m. Moreover, the reported idea can be extended to the design of multiaxis rotary stage. © 2001-2012 IEEE.

KeywordCompliant Mechanism Mechanism Design Micropositioning Rotary Stage Sensors And Actuators
DOI10.1109/JSEN.2014.2377779
URLView the original
Language英语
WOS Research AreaEngineering ; Instruments & Instrumentation ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Instruments & Instrumentation ; Physics, Applied
WOS IDWOS:000349780000011
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141 USA
The Source to ArticleScopus
Fulltext Access
Citation statistics
Cited Times [WOS]:28   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationDepartment of Electromechanical EngineeringFaculty of Science and Technology, University of Macau, Macau, China
First Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Xu Q.. Design of a large-range compliant rotary micropositioning stage with angle and torque sensing[J]. IEEE Sensors Journal,2015,15(4):2419.
APA Xu Q..(2015).Design of a large-range compliant rotary micropositioning stage with angle and torque sensing.IEEE Sensors Journal,15(4),2419.
MLA Xu Q.."Design of a large-range compliant rotary micropositioning stage with angle and torque sensing".IEEE Sensors Journal 15.4(2015):2419.
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