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Design, modeling, control and experiment for a 2-DOF compliant micro-motion stage
Li Y.; Xiao S.; Xi L.; Wu Z.
2014
Source PublicationInternational Journal of Precision Engineering and Manufacturing
ISSN22347593
Volume15Issue:4Pages:735
AbstractA new XY micro-motion stage is proposed with the double four-bar prismatic joints to transfer linear motions and mechanical displacement amplifier. The compliance models of the amplifier, the prismatic joints, and the whole stage are established based on the flexibility matrix method. The simulation is made by using finite element analysis ANSYS software. The output cross-talk is about 2% and the parasitic motions of the input points in the other limbs are less than 1.8%, which shows a good decoupling property. The mechanical prototype is fabricated, the experimental results show that the input/output of the stage has a very good linearity, the ratio of output displacement to input displacement is 5.06 and the working range is 156 μm × 156 μm. To tackle for the serious hysteresis nonlinear problems of the stage, model reference adaptive PID controller is designed, the final resolution can reach ±0.2 μm. © 2014 Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg.
KeywordCompliance matrix method Double four-bar prismatic joints Finite element analysis Model reference adaptive PID
DOI10.1007/s12541-014-0394-x
URLView the original
Language英语
The Source to ArticleScopus
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Cited Times [WOS]:49   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionUniversity of Macau
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GB/T 7714
Li Y.,Xiao S.,Xi L.,et al. Design, modeling, control and experiment for a 2-DOF compliant micro-motion stage[J]. International Journal of Precision Engineering and Manufacturing,2014,15(4):735.
APA Li Y.,Xiao S.,Xi L.,&Wu Z..(2014).Design, modeling, control and experiment for a 2-DOF compliant micro-motion stage.International Journal of Precision Engineering and Manufacturing,15(4),735.
MLA Li Y.,et al."Design, modeling, control and experiment for a 2-DOF compliant micro-motion stage".International Journal of Precision Engineering and Manufacturing 15.4(2014):735.
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