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Design, optimization and testing of a compact XY parallel nanopositioning stage with stacked structure
Wu, Zeyi; Xu, Qingsong
2018-08
Source PublicationMECHANISM AND MACHINE THEORY
ISSN0094-114X
Volume126Pages:171-188
Abstract

This paper presents the design, optimization, fabrication and testing of a new piezo-driven compact XY parallel stage for nanopositioning applications. A decoupled, compact parallel stage is developed by a stacked design, which provides a larger area ratio than existing piezo-driven stages. Displacement amplifiers are adopted to amplify the stroke of piezoelectric actuators. The amplifiers are then improved and integrated with the motion decoupler to isolate the two actuators. The main design variables of the stage are optimized by applying a genetic algorithm based on finite-element analysis (FEA) to achieve the required performance. The optimized design is then further improved to enhance the stage performance, which is verified by performing FEA simulation studies. A prototype stage is fabricated for experimental study. Both open-loop and closed-loop testing are conducted to validate the stage's performance. Results show that the decoupled XY stage possesses a compact dimension of 87.2 x 87.2 mm(2), which offers a workspace of 212.48 x 219.24 mu m(2) with a resolution of 7 nm. (C) 2018 Elsevier Ltd. All rights reserved.

KeywordMicro/nano-positioning Compliant Mechanisms Flexure Hinges Finite-element Analysis Mechanism Design
DOI10.1016/j.mechmachtheory.2018.04.008
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering
WOS SubjectEngineering, Mechanical
WOS IDWOS:000432783700011
PublisherPERGAMON-ELSEVIER SCIENCE LTD
The Source to ArticleWOS
Fulltext Access
Citation statistics
Cited Times [WOS]:5   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China
First Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Wu, Zeyi,Xu, Qingsong. Design, optimization and testing of a compact XY parallel nanopositioning stage with stacked structure[J]. MECHANISM AND MACHINE THEORY,2018,126:171-188.
APA Wu, Zeyi,&Xu, Qingsong.(2018).Design, optimization and testing of a compact XY parallel nanopositioning stage with stacked structure.MECHANISM AND MACHINE THEORY,126,171-188.
MLA Wu, Zeyi,et al."Design, optimization and testing of a compact XY parallel nanopositioning stage with stacked structure".MECHANISM AND MACHINE THEORY 126(2018):171-188.
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