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Design, testing and precision control of a novel long-stroke flexure micropositioning system
Xu Q.
2013
Source PublicationMechanism and Machine Theory
ISSN0094114X
Volume70Pages:209
Abstract

This paper presents the design, modeling, analysis, testing and control of a novel compact long-stroke precision positioning stage. The stage is devised with leaf flexures to achieve a submicron-accuracy positioning with a stroke longer than 10 mm. Stage architectural parameters are designed to achieve the maximum natural frequency and then further improved to ensure a robust motion along the working axis. A voice coil motor and a laser displacement sensor are adopted for actuation and sensing of the fabricated stage, respectively. Both finite-element analysis and experimental tests confirm a motion range over 11 mm. To facilitate a rapid and precise positioning in front of nonlinear effects, a discrete-time sliding mode control (DSMC) algorithm based on a proportional-integral-derivative (PID) type of sliding function is devised. The DSMC guarantees the stability of the system in the presence of model uncertainties and disturbances. The effectiveness of the presented DSMC is verified through experimental studies. Results show that the DSMC is superior to PID algorithm in terms of both transient response speed and steady-state accuracy. © 2013 Elsevier Ltd.

KeywordFinite-element Analysis Flexure Hinges Long Stroke Motion Control Optimum Design Sliding Mode Control
DOI10.1016/j.mechmachtheory.2013.07.016
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering
WOS SubjectEngineering, Mechanical
WOS IDWOS:000328011800014
The Source to ArticleScopus
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Citation statistics
Cited Times [WOS]:39   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Av. Padre Tomas Pereira S.J., Taipa, Macao, China
First Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Xu Q.. Design, testing and precision control of a novel long-stroke flexure micropositioning system[J]. Mechanism and Machine Theory,2013,70:209.
APA Xu Q..(2013).Design, testing and precision control of a novel long-stroke flexure micropositioning system.Mechanism and Machine Theory,70,209.
MLA Xu Q.."Design, testing and precision control of a novel long-stroke flexure micropositioning system".Mechanism and Machine Theory 70(2013):209.
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