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Design and development of a flexure-based dual-stage nanopositioning system with minimum interference behavior
Xu Q.
2012
Source PublicationIEEE Transactions on Automation Science and Engineering
ISSN15455955
Volume9Issue:3Pages:554
Abstract

Dual-servo systems (DSSs) are highly desirable in micro-/nanomanipulation when high positioning accuracy, long stroke motion, and high servo bandwidth are required simultaneously. This paper presents the design and development of a new flexure-based dual-stage nanopositioning system. A coarse voice coil motor (VCM) and a fine piezoelectric stack actuator (PSA) are adopted to provide long stroke and quick response, respectively. A new decoupling design is carried out to minimize the interference behavior between the coarse and fine stages by taking into account actuation schemes as well as guiding mechanism implementations. Both analytical results and finite-element model (FEM) results show that the system is capable of over 10 mm traveling, while possessing a compact structure. To verify the decoupling property, a single-input-single- output (SISO) control scheme is realized on a prototype to demonstrate the performance of the DSS without considering the interference behavior. Experimental results not only confirm the superiority of the dual-servo stage over the standalone coarse stage but reveal the effectiveness of the proposed idea of decoupling design. © 2004-2012 IEEE.

KeywordDecoupling Design Dual-servo System (Dss) Flexure Mechanisms Micro-/nanopositioning Motion Control
DOI10.1109/TASE.2012.2198918
URLView the original
Indexed BySCI
Language英语
WOS Research AreaAutomation & Control Systems
WOS SubjectAutomation & Control Systems
WOS IDWOS:000309841800010
The Source to ArticleScopus
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被引频次[WOS]:68   [WOS记录]     [WOS相关记录]
Document TypeJournal article
专题DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macao, China
First Author AffilicationFaculty of Science and Technology
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Xu Q.. Design and development of a flexure-based dual-stage nanopositioning system with minimum interference behavior[J]. IEEE Transactions on Automation Science and Engineering,2012,9(3):554.
APA Xu Q..(2012).Design and development of a flexure-based dual-stage nanopositioning system with minimum interference behavior.IEEE Transactions on Automation Science and Engineering,9(3),554.
MLA Xu Q.."Design and development of a flexure-based dual-stage nanopositioning system with minimum interference behavior".IEEE Transactions on Automation Science and Engineering 9.3(2012):554.
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