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Design and development of a compact flexure-based XY precision positioning system with centimeter range
Xu Q.
2014
Source PublicationIEEE Transactions on Industrial Electronics
ISSN2780046
Volume61Issue:2Pages:893
Abstract

This paper presents the design and development of a novel flexure parallel-kinematics precision positioning stage with a centimeter range and compact dimension. The stage mechanism is devised using leaf flexures to achieve a decoupled and modular structure. Structural parameters are carefully designed to guarantee the range, stiffness, resonant frequency, and payload capabilities in consideration of manufacturing tolerance. The parametric design is verified by conducting finite-element analysis, which reveals a reachable motion range over 20 mm in each working axis. Moreover, a prototype XY stage is fabricated, which is actuated and sensed by two voice coil motors and laser displacement sensors, respectively. Experimental results demonstrate that the stage is capable of positioning with a workspace over 11 mm × 11 mm. It is more compact than existing works, which is reflected by a larger area ratio of workspace to planar dimension. Both static and dynamic tests exhibit a small crosstalk between the two axes, which indicates a well-decoupled motion property. The implemented feedback control enables a precision positioning with submicrometer resolution and accuracy. The control bandwidth and payload influences on stage performances are experimentally examined as well. © 1982-2012 IEEE.

KeywordDecoupling Flexure Mechanisms Long Stroke Micro-/nanopositioning Motion Control Parallel Mechanisms
DOI10.1109/TIE.2013.2257139
URLView the original
Indexed BySCI
Language英语
WOS Research AreaAutomation & Control Systems ; Engineering ; Instruments & Instrumentation
WOS SubjectAutomation & Control Systems ; Engineering, Electrical & Electronic ; Instruments & Instrumentation
WOS IDWOS:000323492000027
The Source to ArticleScopus
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Citation statistics
Cited Times [WOS]:115   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macao, China
First Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Xu Q.. Design and development of a compact flexure-based XY precision positioning system with centimeter range[J]. IEEE Transactions on Industrial Electronics,2014,61(2):893.
APA Xu Q..(2014).Design and development of a compact flexure-based XY precision positioning system with centimeter range.IEEE Transactions on Industrial Electronics,61(2),893.
MLA Xu Q.."Design and development of a compact flexure-based XY precision positioning system with centimeter range".IEEE Transactions on Industrial Electronics 61.2(2014):893.
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