UM
Design and Optimization of a Compact XY Parallel Micro/Nano-Positioning Stage with Stacked Structure
Wu, Zeyi; Xu, Qingsong; IEEE
2017
Conference Name2017 2ND INTERNATIONAL CONFERENCE ON ADVANCED ROBOTICS AND MECHATRONICS (ICARM)
Pages558-563
Publication Place345 E 47TH ST, NEW YORK, NY 10017 USA
PublisherIEEE
AbstractThis paper introduces the design and optimization of a new piezo-driven compact XY parallel stage for micro/nano-positioning applications. The compact parallel stage is developed with a stacked design. A displacement amplifier is adopted to amplify the stroke of piezo actuator. The amplifier is then improved and integrated with the decoupler to isolate the two actuators. The main design variables of the stage are optimized by applying a genetic algorithm based on finite-element analysis (FEA) for achieving the required performance. The designed stage is then further improved to enhance the stage's performance. The performance of the proposed XY precision stage is verified by performing FEA simulation studies.
KeywordMicro/Nano-positioning Mechanism design Stacked Structure Parameter Optimization FEA Analysis
URLView the original
Indexed ByCPCI
Language英语
WOS Research AreaAutomation & Control Systems ; Engineering ; Robotics
WOS SubjectAutomation & Control Systems ; Engineering, Electrical & Electronic ; Engineering, Mechanical ; Robotics
WOS IDWOS:000426453700099
The Source to ArticleWOS
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Citation statistics
Cited Times [WOS]:1   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionUniversity of Macau
Recommended Citation
GB/T 7714
Wu, Zeyi,Xu, Qingsong,IEEE. Design and Optimization of a Compact XY Parallel Micro/Nano-Positioning Stage with Stacked Structure[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2017:558-563.
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