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Design of a flexure-based constant-force XY precision positioning stage
Wang, Piyu; Xu, Qingsong
2017-02
Source PublicationMECHANISM AND MACHINE THEORY
ISSN0094-114X
Volume108Pages:1-13
Abstract

This paper presents the design of a new flexure-based XY precision positioning stage with constant force output. Its uniqueness lies in the reduction of driving force for achieving a large stroke output and the realization of a constant force output without using a force controller. By combining the bistable beams and positive-stiffness leaf flexures, a zero-stiffness mechanism is devised. An analytical model of the stage is established and verified by conducting finite-element analysis. The structure parameters are designed for the requirements of range, stiffness, and payload capabilities. A prototype stage is fabricated for experimental studies. Results show that the developed stage delivers a constant force of 29 N and a constant-force motion range of 700 mu m along with less than 1% motion coupling in each working axis. The stage possesses a good motion repeatability, which indicates a hysteresis width lower than 1.5% of the maximum force. Multiple motion tests reveal that the stage has less than +/- 1 N float of the constant force. Moreover, sensitivity analysis results indicate that the machining errors of the in-plane width and inclined angle of the bistable beams are the main reasons which cause the discrepancy between simulation and experimental results.

KeywordCompliant Mechanisms Constant Force Bistable Beam Zero Stiffness Mechanism Design
DOI10.1016/j.mechmachtheory.2016.10.007
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering
WOS SubjectEngineering, Mechanical
WOS IDWOS:000391079200001
PublisherPERGAMON-ELSEVIER SCIENCE LTD
The Source to ArticleWOS
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被引频次[WOS]:33   [WOS记录]     [WOS相关记录]
Document TypeJournal article
专题DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China
First Author AffilicationFaculty of Science and Technology
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Wang, Piyu,Xu, Qingsong. Design of a flexure-based constant-force XY precision positioning stage[J]. MECHANISM AND MACHINE THEORY,2017,108:1-13.
APA Wang, Piyu,&Xu, Qingsong.(2017).Design of a flexure-based constant-force XY precision positioning stage.MECHANISM AND MACHINE THEORY,108,1-13.
MLA Wang, Piyu,et al."Design of a flexure-based constant-force XY precision positioning stage".MECHANISM AND MACHINE THEORY 108(2017):1-13.
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