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Design and control of a novel piezo-driven XY parallel nanopositioning stage
Zhang, Xiaozhi; Zhang, Yulong; Xu, Qingsong
2017-04
Source PublicationMICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
ISSN0946-7076
Volume23Issue:4Pages:1067-1080
Abstract

This paper presents the mechanism and control design of a modular XY nanopositioning stage employing flexure mechanisms and piezoelectric actuators. A new compact parallel flexure stage with two translational degrees-of-freedom is presented. The dual-stacked bridge-type amplifier is employed by a serial connection of two amplifiers. Static and dynamic analytical modeling of the XY stage are carried out, which are verified by performing finite element analysis simulations. Owing to a larger amplification ratio of the bridge-type amplifier and acceptable decoupling property, the stage exhibits a nearly decoupled two-dimensional large motion. Moreover, the adaptive discrete sliding mode control scheme is devised to achieve precise positioning for the stage. The performance and effectiveness of this presented design are verified by several experimental studies.

DOI10.1007/s00542-016-2854-y
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied
WOS IDWOS:000397499300026
PublisherSPRINGER
The Source to ArticleWOS
Fulltext Access
Citation statistics
Cited Times [WOS]:9   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniv Macau, Fac Sci & Technol, Dept Electromech Engn, Ave Univ, Taipa, Macau, Peoples R China
First Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Zhang, Xiaozhi,Zhang, Yulong,Xu, Qingsong. Design and control of a novel piezo-driven XY parallel nanopositioning stage[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2017,23(4):1067-1080.
APA Zhang, Xiaozhi,Zhang, Yulong,&Xu, Qingsong.(2017).Design and control of a novel piezo-driven XY parallel nanopositioning stage.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,23(4),1067-1080.
MLA Zhang, Xiaozhi,et al."Design and control of a novel piezo-driven XY parallel nanopositioning stage".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 23.4(2017):1067-1080.
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