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Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system
Ding, Bingxiao; Li, Yangmin; Xiao, Xiao; Tang, Yirui; Li, Bin
2017-05-23
Source PublicationMECHANICAL SCIENCES
ISSN2191-9151
Volume8Issue:1Pages:117-126
AbstractFlexure-based mechanisms have been widely used for scanning tunneling microscopy, nanoimprint lithography, fast servo tool system and micro/nano manipulation. In this paper, a novel planar micromanipulation stage with large rotational displacement is proposed. The designed monolithic manipulator has three degrees of freedom (DOF), i.e. two translations along the X and Y axes and one rotation around Z axis. In order to get a large workspace, the lever mechanism is adopted to magnify the stroke of the piezoelectric actuators and also the leaf beam flexure is utilized due to its large rotational scope. Different from conventional pre-tightening mechanism, a modified pre-tightening mechanism, which is less harmful to the stacked actuators, is proposed in this paper. Taking the circular flexure hinges and leaf beam flexures hinges as revolute joints, the forward kinematics and inverse kinematics models of this stage are derived. The workspace of the micromanipulator is finally obtained, which is based on the derived kinematic models.
DOI10.5194/ms-8-117-2017
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering
WOS SubjectEngineering, Mechanical
WOS IDWOS:000401934400001
PublisherCOPERNICUS GESELLSCHAFT MBH
The Source to ArticleWOS
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被引频次[WOS]:7   [WOS记录]     [WOS相关记录]
Document TypeJournal article
专题University of Macau
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GB/T 7714
Ding, Bingxiao,Li, Yangmin,Xiao, Xiao,et al. Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system[J]. MECHANICAL SCIENCES,2017,8(1):117-126.
APA Ding, Bingxiao,Li, Yangmin,Xiao, Xiao,Tang, Yirui,&Li, Bin.(2017).Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system.MECHANICAL SCIENCES,8(1),117-126.
MLA Ding, Bingxiao,et al."Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system".MECHANICAL SCIENCES 8.1(2017):117-126.
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