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Dynamics modeling and sliding mode control of an XY micropositioning stage
Qingsong Xu; Yangmin Li
Conference Namethe 9th International IFAC Symposium on Robot Control
Source PublicationProceedings of the 9th International IFAC Symposium on Robot Control (SYROCO'09)
Conference DateSeptember 9-12, 2009
Conference PlaceGifu, Japan

In this paper, sliding mode control (SMC) is implemented on an XY parallel micropositioning stage for a sub-micron accuracy tracking control. To design the controller, a dynamics model of the system is established with the combination of the flexure hinge-based stage and piezoelectric actuator (PZT), and model parameters are identified by experiments and finite element analysis performed via ANSYS software package. Moreover, a high-gain velocity observer is adopted to estimate the feedback velocity from the measured position. The efficiency of the designed SMC controller over traditional PID controller is demonstrated through simulations and the variations of design parameters on control performances are examined as well. The results show that the SMC can compensate for unmodeled hysteresis well, which provides a sound base for practical control of the micropositioning stage dedicated to micro/nano scale manipulation.

KeywordMicro/nano Manipulation Robot Control Robotic Manipulators Robust Control
Fulltext Access
Document TypeConference paper
CollectionFaculty of Science and Technology
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macao SAR, P. R. China
First Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Qingsong Xu,Yangmin Li. Dynamics modeling and sliding mode control of an XY micropositioning stage[C],2009.
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