Design of a Novel Piezo-Driven XYZ Compliant Parallel Micro/Nano-Positioning Stage | |
Zeyi Wu; Qingsong Xu![]() | |
2018 | |
Conference Name | 2018 IEEE International Conference on Robotics and Biomimetics (ROBIO) |
Source Publication | 2018 IEEE International Conference on Robotics and Biomimetics (ROBIO) |
Conference Date | 12-15 Dec. 2018 |
Conference Place | Kuala Lumpur, Malaysia, Malaysia |
Abstract | This paper presents the design and optimization of a symmetrical compliant XYZ parallel stage for micro-/nanopositioning, which is driven by three piezoelectric actuators (PEAs). A compact design is devised by introducing serialparallel 3-DOF decoupling unit and spatial compound bridgetype amplifiers. Structural parameter optimization has been conducted via finite-element analysis (FEA)-based multi-objective genetic algorithm, which produces a compact physical size of the XYZ stage. The performance of the optimized XYZ stage under different loads are evaluated by FEA simulation study. Under free-load condition, the stage is able to provide a workspace of 143.10×143.12×135.18 μm3. The maximum horizontal cross-axis error is only 0.01%, while the vertical cross-axis error is 5.54%, which is caused by the gravity effect. The loading test result reveals that the maximum bearable load of the stage is up to 74.46 N, i.e., 7.6 kg. |
Keyword | Micro-/nano-positioning Compliant Mechanism Piezoelectric Actuator Parallel Kinematics Mechanism Design |
DOI | http://doi.org/10.1109/ROBIO.2018.8665107 |
Language | 英语 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | Faculty of Science and Technology DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Affiliation | Department of Electromechanical Engineering, Faculty of Science and Technology University of Macau Macao, China |
First Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Zeyi Wu,Qingsong Xu. Design of a Novel Piezo-Driven XYZ Compliant Parallel Micro/Nano-Positioning Stage[C],2018. |
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