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Recent Advances in the Control of Piezoelectric Actuator
Ziqiang Chi; Qingsong Xu
2014-11-17
Source PublicationInternational Journal of Advanced Robotic Systems
ISSN1729-8814
Volume11Issue:11
Abstract

The micro/nano positioning field has made great progress towards enabling the advance of micro/nano technology. Micro/nano positioning stages actuated by piezoelectric actuators are the key devices in micro/nano manipulation. The control of piezoelectric actuators has emerged as a hot topic in recent years. Piezoelectric materials have inherent hysteresis and creep nonlinearity, which can reduce the accuracy of the manipulation, even causing the instability of the whole system. Remarkable efforts have been made to compensate for the nonlinearity of piezoelectric actuation through the mathematical modelling and control approaches. This paper provides a review of recent advances on the control of piezoelectric actuators. After a brief introduction of basic components of typical piezoelectric micro/nano positioning platforms, the working principle and modelling of piezoelectric actuators are outlined in this paper. This is followed with the major control method and recent progress is presented in detail. Finally, some open issues and future work on the control of piezoelectric actuators are extensively discussed.

KeywordPiezoelectric Actuator Micro/nano Positioning Stage Hysteresis Nonlinearity Control Algorithm Dynamic Modelling
DOIhttps://doi.org/10.5772/59099
Indexed BySCI
Language英语
WOS Research AreaRobotics
WOS SubjectRobotics
WOS IDWOS:000345848400001
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Cited Times [WOS]:13   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionFaculty of Science and Technology
DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorQingsong Xu
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Taipa, Macau, China
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Ziqiang Chi,Qingsong Xu. Recent Advances in the Control of Piezoelectric Actuator[J]. International Journal of Advanced Robotic Systems,2014,11(11).
APA Ziqiang Chi,&Qingsong Xu.(2014).Recent Advances in the Control of Piezoelectric Actuator.International Journal of Advanced Robotic Systems,11(11).
MLA Ziqiang Chi,et al."Recent Advances in the Control of Piezoelectric Actuator".International Journal of Advanced Robotic Systems 11.11(2014).
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