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Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning
Zeyi Wu; Qingsong Xu
2019-04
Source PublicationIEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING
ISSN1545-5955
Volume16Issue:2Pages:908 - 918
Abstract

This paper presents the design of a new compact one-degree-of-freedom (1-DOF) compliant stage driven by a piezoelectric actuator (PEA) for micro/nanopositioning in the vertical direction. An orthogonal compound bridge-type amplifier is introduced to amplify the displacement of the PEA. It significantly reduces the height of the stage and leads to a compact design. By analytical modeling of the mechanism, the design variables are determined, which are then optimized via the multiobjective genetic algorithm based on the finite-element analysis. Simulation results show that the 1-DOF stage is able to provide the maximum displacement of 181.18 µm in theory, which is more than 12 × the input displacement of PEA. Payload test results indicate that the stage can support a maximum load of about 80 N. Comparison study reveals that the presented vertical positioning stage offers a more compact structure than existing ones. A prototype is fabricated for experimental studies, and the deviation between the experimental and simulation results is discussed in detail. Moreover, closed-loop performance test exhibits a resolution of 10 nm for the developed vertical positioning stage. Note to Practitioners—The motivation of this paper is to devise a compact flexure-based stage, which can be mounted on the top of an XY stage for constructing a hybrid type of XYZ stage dedicated to micro/nanopositioning applications. Such a design scheme provides a more flexible solution than serial- and parallel-kinematic designs. In order to fulfill the design requirement and to improve the compactness and output directionality of the stage, a series of design processes is conducted. The design parameters are optimized and the optimal design leads to the stage dimension of 58 mm × 20 mm × 15.5 mm (length × width × height), which offers a motion range of 97.32 µm as verified by the experimental study. In consideration of the motion range and physical size, the proposed stage offers a more compact structure than available designs. Experimental results demonstrate the fine performance of the developed prototype stage for vertical micro/nanopositioning.

KeywordCompliant Mechanism Flexure Stage Mechanism Design Micro/nanopositioning Piezoelectric Actuator (Pea)
DOIhttp://doi.org/10.1109/TASE.2018.2875711
Language英语
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Document TypeJournal article
CollectionFaculty of Science and Technology
DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorQingsong Xu
Affiliationthe Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macau, China
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Zeyi Wu,Qingsong Xu. Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning[J]. IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING,2019,16(2):908 - 918.
APA Zeyi Wu,&Qingsong Xu.(2019).Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning.IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING,16(2),908 - 918.
MLA Zeyi Wu,et al."Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning".IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING 16.2(2019):908 - 918.
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