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Deflections of magnetic actuators with different widths of microcantilevers
Hsieh Y.-P.; Wei Z.-H.; Yip M.-C.
2011-08-01
Source PublicationJapanese Journal of Applied Physics
ISSN00214922 13474065
Volume50Issue:8 PART 1
AbstractTwo magnetic actuators with different widths of microcantilevers are fabricated using electron beam lithography and electron beam evaporation and placed in various magnetic fields to observe the discrepancy between their flexures. One magnetic actuator of a 76 × 0:75 × 0:3 μm silicon oxide microcantilever and a 75 × 9 × 0:3 μm silicon oxide plate deposited on a 60 × 1 × 0:09 μm ferromagnetic thin film; the other of a 76 × 0:85 × 0:3 μm silicon oxide microcantilever and a 75 × 9 × 0:3 μm silicon oxide plate deposited on a 60 × 1 × 0:09 μm ferromagnetic thin film. The magnetic actuator is bent by magnetic torque produced by the ferromagnetic thin film under an external magnetic field owing to the fabrication of a highly sensitive microcantilever and the design of a high magnetic shape anisotropy. In this study, we prove the effect of the width of the microcantilever by the deflection of the magnetic actuator. The deflection of the magnetic actuator can be forecasted, when the magnetic actuator is used for gripping a cell. © 2011 The Japan Society of Applied Physics.
DOI10.1143/JJAP.50.087202
URLView the original
Language英語
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Cited Times [WOS]:2   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionUniversity of Macau
AffiliationNational Tsing Hua University
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GB/T 7714
Hsieh Y.-P.,Wei Z.-H.,Yip M.-C.. Deflections of magnetic actuators with different widths of microcantilevers[J]. Japanese Journal of Applied Physics,2011,50(8 PART 1).
APA Hsieh Y.-P.,Wei Z.-H.,&Yip M.-C..(2011).Deflections of magnetic actuators with different widths of microcantilevers.Japanese Journal of Applied Physics,50(8 PART 1).
MLA Hsieh Y.-P.,et al."Deflections of magnetic actuators with different widths of microcantilevers".Japanese Journal of Applied Physics 50.8 PART 1(2011).
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