Resorcinol-formaldehyde aerogels for CMOS-MEMS capacitive humidity sensor
Chung V.P.J.; Yip M.-C.; Fang W.
Source PublicationSensors and Actuators, B: Chemical
AbstractAbstract This paper reports the design, implementation and characterization of a capacitive humidity sensor based on a new kind of organic polymer, resorcinol-formaldehyde (RF) aerogel. The developed fabrication is compatible with CMOS process. In the design, aerogel solution is filled into a vertical parallel-plate (VPP) structure, prepared by the sol-gel method and supercritical fluid (SCF) drying for capacitive sensing. The low-density RF-aerogels synthesized by this method exhibit high surface areas, high porosities, and mesoporosity, which are beneficial to moisture diffusion and sensing reaction. The present sensor shows a sensitivity of 0.595% capacitance change per percent relative humidity (%RH) with a response time of 12 s. Further measurements exhibit maximum hysteresis of 1.1%RH and a 48-h signal drift of 0.75%RH have been obtained. Moreover, temperature calibration of the proposed humidity sensor was carried out. The monolithic integration of an on-chip resistive temperature detector (RTD) with the proposed humidity sensor is thus implemented for the temperature compensated readout.
KeywordCMOS-MEMS Humidity sensor Resorcinol-formaldehyde aerogels
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Cited Times [WOS]:9   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionUniversity of Macau
AffiliationNational Tsing Hua University
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GB/T 7714
Chung V.P.J.,Yip M.-C.,Fang W.. Resorcinol-formaldehyde aerogels for CMOS-MEMS capacitive humidity sensor[J]. Sensors and Actuators, B: Chemical,2015,214:181-188.
APA Chung V.P.J.,Yip M.-C.,&Fang W..(2015).Resorcinol-formaldehyde aerogels for CMOS-MEMS capacitive humidity sensor.Sensors and Actuators, B: Chemical,214,181-188.
MLA Chung V.P.J.,et al."Resorcinol-formaldehyde aerogels for CMOS-MEMS capacitive humidity sensor".Sensors and Actuators, B: Chemical 214(2015):181-188.
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