UM
Preparation and electrical properties of (100) Preferred (Ba,Sr)TiO 3 bilayer thin films derived from pulse laser deposition method
Lu S.G.1; Friddle P.A.1; Xu Z.K.1; Siu G.G.1; Chen H.1; Wong K.H.2; Mak C.L.2
2005-12-01
Source PublicationKey Engineering Materials
Volume280-283
IssueI
Pages849-852
AbstractBilayer BaSrTiO - Ba SrTiO and BaSr TiO - BaSrTiO thin films were deposited on the LaNiO-buffered Pt/Ti/SiO /Si substrates using pulse laser deposition method. A (100) preferred orientation was obtained. The structure was characterized using x-ray diffraction (XRD) and Raman spectroscopy. The leakage current, and dielectric permittivity versus temperature were characterized. Results indicated that the (100) preferred bilayer structure had less leakage current and smaller loss tangent, which was in favor of enhancing the quality of thin film used as microwave dielectrics.
KeywordBarium strontium titanate Preferred orientation Pulse laser deposition Thin film
URLView the original
Language英語
Fulltext Access
Document TypeConference paper
CollectionUniversity of Macau
Affiliation1.City University of Hong Kong
2.Hong Kong Polytechnic University
Recommended Citation
GB/T 7714
Lu S.G.,Friddle P.A.,Xu Z.K.,et al. Preparation and electrical properties of (100) Preferred (Ba,Sr)TiO 3 bilayer thin films derived from pulse laser deposition method[C],2005:849-852.
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