UM
High-performance III-nitride blue LEDs grown and fabricated on patterned Si substrates
Zhang B.; Liang H.; Wang Y.; Feng Z.; Ng K.W.; Lau K.M.
2007
Source PublicationJournal of Crystal Growth
ISSN00220248
Volume298Issue:SPEC. ISSPages:725-730
AbstractInGaN/GaN based blue LEDs with 2-μm-thick crack-free GaN buffer layers were successfully grown and fabricated on patterned Si (1 1 1) substrates. The patterns on the substrates include 340 μm×340 μm square islands, separated by 3-μm deep and 20 μm wide trenches, along the 〈 1 over(l, -) 0 〉 and 〈 1 1 over(2, -) 〉 crystalline orientations. In addition to using the patterned growth technique, thin AlN and SiN interlayers grown at high temperatures were also employed to partially release the residual stress and to further improve the crystalline quality. Blue LEDs of 300×300 μm fabricated on the islands, without thinning and packaging, exhibited a high output power of around 0.7 mW at a drive current of 20 mA. Compared to III-nitride LEDs grown on sapphire substrates, the same LED structures grown on patterned Si substrates showed a few nm of red shift in emitting wavelength, suggesting some residual stress of GaN on patterned Si. © 2006 Elsevier B.V. All rights reserved.
KeywordA1. X-ray diffraction A3. Metalorganic chemical vapor deposition B1. Nitride B2. Semiconductor III-V materials B3. Light-emitting diodes
DOI10.1016/j.jcrysgro.2006.10.170
URLView the original
Language英語
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Cited Times [WOS]:64   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionUniversity of Macau
AffiliationHong Kong University of Science and Technology
Recommended Citation
GB/T 7714
Zhang B.,Liang H.,Wang Y.,et al. High-performance III-nitride blue LEDs grown and fabricated on patterned Si substrates[J]. Journal of Crystal Growth,2007,298(SPEC. ISS):725-730.
APA Zhang B.,Liang H.,Wang Y.,Feng Z.,Ng K.W.,&Lau K.M..(2007).High-performance III-nitride blue LEDs grown and fabricated on patterned Si substrates.Journal of Crystal Growth,298(SPEC. ISS),725-730.
MLA Zhang B.,et al."High-performance III-nitride blue LEDs grown and fabricated on patterned Si substrates".Journal of Crystal Growth 298.SPEC. ISS(2007):725-730.
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