High photo-responsivity ZnO UV detectors fabricated by RF reactive sputtering

doi:10.1016/j.materresbull.2012.10.030

	High photo-responsivity ZnO UV detectors fabricated by RF reactive sputtering
	Zhang X.L.2; Hui K.S.1; Hui K.N.2
	2013-02-01
Source Publication	Materials Research Bulletin
ISSN	00255408
Volume	48 Issue:2 Pages:305-309
Abstract	High performance ultraviolet (UV) detectors based on ZnO metal-semiconductor-metal (MSM) and p-n heterojunctions, p-NiO/n-ZnO, were fabricated and their UV photo-responsivity was measured at room temperature. High-quality ZnO and NiO thin films were deposited on quartz substrates at room temperature under optimized RF reactive sputtering conditions. For ZnO-based MSM UV detectors using Al as a contact metal, the linear current-voltage (I-V) characteristics under a forward bias exhibited ohmic metal-semiconductor contact. A maximum photocurrent and photo-responsivity of 2.5 mA and 1410 A/W, respectively, at 365 nm under 5 V bias was observed, indicating the high photo-responsivity of the ZnO MSM detector. In comparison, a p-NiO/n-ZnO p-n heterojunction UV detector demonstrated clear rectifying I-V characteristics with an ideality factor, forward threshold voltage and photo-responsivity of 2, 0.9 V and 0.09 A/W, respectively, at 362 nm under a reverse bias of 4 V, which is close to that of the commercial GaN UV detector (∼0.1 A/W). © 2012 Elsevier Ltd.
Keyword	A. Semiconductors A. Thin films D. Electrical properties D. Optical properties
DOI	10.1016/j.materresbull.2012.10.030
URL	View the original
Language	英語
全文获取链接	View Full-Text via DOI View Full-Text via Web of Science View Full-Text via Scopus
引用统计	被引频次[WOS]：39 [WOS记录] [WOS相关记录]
Document Type	Journal article
专题	University of Macau
Affiliation	1.City University of Hong Kong 2.Pusan National University
推荐引用方式 GB/T 7714	Zhang X.L.,Hui K.S.,Hui K.N.. High photo-responsivity ZnO UV detectors fabricated by RF reactive sputtering[J]. Materials Research Bulletin,2013,48(2):305-309.
APA	Zhang X.L.,Hui K.S.,&Hui K.N..(2013).High photo-responsivity ZnO UV detectors fabricated by RF reactive sputtering.Materials Research Bulletin,48(2),305-309.
MLA	Zhang X.L.,et al."High photo-responsivity ZnO UV detectors fabricated by RF reactive sputtering".Materials Research Bulletin 48.2(2013):305-309.