UM
Growth and visible photoluminescence of highly oriented (100) zinc oxide film synthesized on silicon by plasma immersion ion implantation
Mei Y.F.1; Fu R.K.Y.1; Siu G.G.1; Chu P.K.2; Li Z.M.2; Yang C.L.2; Ge W.K.2; Tang Z.K.2; Cheung W.Y.3; Wong S.P.3
2004-12-10
Source PublicationMaterials Science in Semiconductor Processing
Volume7
Issue4-6 SPEC. ISS.
Pages459-462
AbstractHigh-quality (100) ZnO films with smooth surface topography have been synthesized on Si substrate by plasma immersion ion implantation. The materials exhibit compressive stress because of room temperature growth. After annealing at different temperatures, various visible photoluminescence bands are observed. The optical phenomenon as well as the transition mechanism which may involve defects such as [Zni], [VZn], and [Or] induced by the high substrate bias are discussed in this paper. © 2004 Elsevier Ltd. All rights reserved.
KeywordAnnealing Photoluminescence ZnO
DOI10.1016/j.mssp.2004.09.021
URLView the original
Language英語
Fulltext Access
Citation statistics
Cited Times [WOS]:10   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionUniversity of Macau
Affiliation1.City University of Hong Kong
2.Hong Kong University of Science and Technology
3.Chinese University of Hong Kong
Recommended Citation
GB/T 7714
Mei Y.F.,Fu R.K.Y.,Siu G.G.,et al. Growth and visible photoluminescence of highly oriented (100) zinc oxide film synthesized on silicon by plasma immersion ion implantation[C],2004:459-462.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Mei Y.F.]'s Articles
[Fu R.K.Y.]'s Articles
[Siu G.G.]'s Articles
Baidu academic
Similar articles in Baidu academic
[Mei Y.F.]'s Articles
[Fu R.K.Y.]'s Articles
[Siu G.G.]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Mei Y.F.]'s Articles
[Fu R.K.Y.]'s Articles
[Siu G.G.]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.