UM
Fabrication of highly (1000) oriented textured zinc oxide films by metal cathodic arc and oxygen dual plasma deposition and their optical properties
Mei Y.F.1; Fu R.K.Y.1; Siu G.G.1; Chu P.K.1; Li Z.M.2; Yang C.L.2; Ge W.K.2; Tang Z.K.2; Cheung W.Y.3; Wong S.P.3
2007-08-05
Source PublicationSurface and Coatings Technology
ISSN02578972
Volume201Issue:19-20 SPEC. ISS.Pages:8348-8351
AbstractHighly (1000) oriented ZnO films were successfully grown onto silicon substrates using a dual plasma deposition process incorporating a metal cathodic arc source and oxygen ambient. The optical properties of a series of ZnO films deposited on quartz using similar conditions were investigated using UV-visible spectrophotometry, and the effects on the band gap were investigated. The absorption of C-excitons resulting in a blue-shift of the band gap at room temperature is accentuated due to strong absorption at higher energy for light polarized (E // c) in the highly (1000) oriented ZnO film. © 2007 Elsevier B.V. All rights reserved.
KeywordCathodic arc Optical properties Plasma deposition Zinc oxide
DOI10.1016/j.surfcoat.2006.10.056
URLView the original
Language英語
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Cited Times [WOS]:8   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionUniversity of Macau
Affiliation1.City University of Hong Kong
2.Hong Kong University of Science and Technology
3.Chinese University of Hong Kong
Recommended Citation
GB/T 7714
Mei Y.F.,Fu R.K.Y.,Siu G.G.,et al. Fabrication of highly (1000) oriented textured zinc oxide films by metal cathodic arc and oxygen dual plasma deposition and their optical properties[J]. Surface and Coatings Technology,2007,201(19-20 SPEC. ISS.):8348-8351.
APA Mei Y.F..,Fu R.K.Y..,Siu G.G..,Chu P.K..,Li Z.M..,...&Wong S.P..(2007).Fabrication of highly (1000) oriented textured zinc oxide films by metal cathodic arc and oxygen dual plasma deposition and their optical properties.Surface and Coatings Technology,201(19-20 SPEC. ISS.),8348-8351.
MLA Mei Y.F.,et al."Fabrication of highly (1000) oriented textured zinc oxide films by metal cathodic arc and oxygen dual plasma deposition and their optical properties".Surface and Coatings Technology 201.19-20 SPEC. ISS.(2007):8348-8351.
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