UM
Experimental investigation of the matching and impressed electric field of a multipolar electron cyclotron resonance discharge
Mak P.; Asmussen J.
1997
Source PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
ISSN07342101
Volume15Issue:1Pages:154-168
AbstractThe experimental performance of an end excited, internally tuned, multipolar electron cyclotron resonance plasma source is investigated versus several independent input variables: (1) incident power (185-350 W), (2) discharge pressure (1-7 mTorr), and (3) microwave matching (applicator length, L, varies from 65-170 mm). Plasma source performance in argon gas is determined from measurements of (1) absorbed microwave power, (2) the magnitude, and (3) the spatial variation of the impressed electric field, and the output (4) plasma density and (5) electron temperature. The nonlinear experimental relationships between variations in the input variables and performance variables are established. Two well-matched stable discharge operational regions or modes are identified as L is varied. Using the measured impressed electric field patterns, these two modes are identified as TM, Φ symmetric, λ, and λ/2 standing wave modes. As L, pressure and power vary, considerable hysteresis in absorbed power and density is observed. However, it is shown that this complex input/output discharge behavior can be approximately explained using simple global plasma models. Despite the multiple steady states and hystereses, it is shown that the discharge can be easily maintained in well-matched, high density (n>3×10/cm) stable operating conditions. The impressed electric field varies between 3 and 4.5 kV/m. An equivalent circuit of the plasma loaded cavity applicator is developed and provides important insights for the plasma matching process. The microwave coupling efficiencies are greater than 98% and the ion production costs vary between 300 and 450 eV/ion versus the experimental inputs. The data presented is useful for plasma source optimization and in developing intelligent plasma processing control strategies. © 1997 American Vacuum Society.
DOI10.1116/1.580458
URLView the original
Language英語
Fulltext Access
Citation statistics
Cited Times [WOS]:11   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionUniversity of Macau
AffiliationMichigan State University
Recommended Citation
GB/T 7714
Mak P.,Asmussen J.. Experimental investigation of the matching and impressed electric field of a multipolar electron cyclotron resonance discharge[J]. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films,1997,15(1):154-168.
APA Mak P.,&Asmussen J..(1997).Experimental investigation of the matching and impressed electric field of a multipolar electron cyclotron resonance discharge.Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films,15(1),154-168.
MLA Mak P.,et al."Experimental investigation of the matching and impressed electric field of a multipolar electron cyclotron resonance discharge".Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 15.1(1997):154-168.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Mak P.]'s Articles
[Asmussen J.]'s Articles
Baidu academic
Similar articles in Baidu academic
[Mak P.]'s Articles
[Asmussen J.]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Mak P.]'s Articles
[Asmussen J.]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.