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Design and development of a new large-stroke XY compliant micropositioning stage
Wan, Sicong; Zhang, Yulong; Xu, Qingsong
2017-09
Source PublicationPROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE
ISSN0954-4062
Volume231Issue:17Pages:3263-3276
Abstract

This paper presents the design and development of a new flexure-based compliant XY micropositioning stage with large stroke. The parallel-kinematic XY compliant stage is designed based on the Roberts mechanisms. Pseudo-rigid-body model is developed to establish the quantitative models of the whole compliant mechanism. Finite element analysis is carried out to validate the performance of the XY stage. A prototype of the XY stage is developed for experimental investigations. Experimental results show that the stage can deliver a working range larger than 12mm in each of the two working axes. Moreover, a feedback control using the proportional-integral-derivative control algorithm is implemented to demonstrate the positioning performance of the developed XY stage. The reported ideas can also be extended to the design and control of other micro-/nanopositioning systems.

KeywordMicropositioning Stage Pseudo-rigid-body Model Roberts Mechanisms Translational Flexure Bearing Finite-element Analysis Proportional-integral-derivative Control
DOI10.1177/0954406216643341
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering
WOS SubjectEngineering, Mechanical
WOS IDWOS:000408531900015
PublisherSAGE PUBLICATIONS LTD
The Source to ArticleWOS
Fulltext Access
Citation statistics
Cited Times [WOS]:3   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationUniv Macau, Fac Sci & Technol, Dept Electromech Engn, Macau, Peoples R China
First Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Wan, Sicong,Zhang, Yulong,Xu, Qingsong. Design and development of a new large-stroke XY compliant micropositioning stage[J]. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE,2017,231(17):3263-3276.
APA Wan, Sicong,Zhang, Yulong,&Xu, Qingsong.(2017).Design and development of a new large-stroke XY compliant micropositioning stage.PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE,231(17),3263-3276.
MLA Wan, Sicong,et al."Design and development of a new large-stroke XY compliant micropositioning stage".PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE 231.17(2017):3263-3276.
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