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An accurate design to calculate and measure the capacitance of CMUT for pressure sensors
Wang J.1; Yu Y.1; Pun S.H.1; Gao Y.2; Che U.K.1; Mak P.U.1
2017-02-09
Source Publication2016 IEEE International Conference on Consumer Electronics-China, ICCE-China 2016
AbstractCapacitive Micromachined Ultrasonic Transducer (CMUT) is a type of micro-electro-mechanical system (MEMS) device which has the advantages such as ease of integration with front-end electronics and fabrication of uniform device arrays. The structure and fundamental working principle of a CMUT are similar to that of a parallel plate capacitor. When working in conventional mode, the deflection profiles can be described by analytical expressions and the capacitance can be calculated thereafter. A design was proposed to calculate the deflection profiles of the CMUT membrane accurately and eliminate the parasitic capacitance of the CMUT device. By appropriately selecting the dimensions of the device, the CMUT can be used as a pressure sensor.
Keywordcapacitance CMUT deflection profile pressure sensor
DOI10.1109/ICCE-China.2016.7849760
URLView the original
Language英語
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Document TypeConference paper
CollectionUniversity of Macau
Affiliation1.Universidade de Macau
2.Key Lab of Medical Instrumentation and Pharmaceutical Technology of Fujian Province
Recommended Citation
GB/T 7714
Wang J.,Yu Y.,Pun S.H.,et al. An accurate design to calculate and measure the capacitance of CMUT for pressure sensors[C],2017.
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