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A low-cost capacitive relative humidity sensor for food moisture monitoring application
Wang B.1; Law M.K.2; Bermak A.1
2012-11-26
Conference Name4th Asia Symposium on Quality Electronic Design (ASQED)
Source PublicationProceedings of the 4th Asia Symposium on Quality Electronic Design, ASQED 2012
Pages95-99
Conference DateJUL 10-11, 2012
Conference PlaceMALAYSIA
Abstract

In this paper, a low-cost capacitive relative humidity hygrometer suitable for food moisture monitoring is presented. The variation of dielectric constant of polyimide film to relative humidity enables the sensor's functionality. A fully differential capacitance to digital converter is utilized as the hygrometer digital readout, which is immune to circuit wiring parasitic and enable the sensor's long-term stability. The humidity sensor is implemented using TSMC1P6M 0.18μm technology with thick top metal option. Simulation results indicate that an inaccuracy of +6/-5%RH can be achieved sensing from 10%RH ∼ 90%RH, with 5.4μW power consumption for sensing and 21.6mW power consumption for sensor heating. © 2012 IEEE.

DOI10.1109/ACQED.2012.6320483
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering
WOS SubjectEngineering, Electrical & Electronic
WOS IDWOS:000309931000017
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Cited Times [WOS]:5   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionINSTITUTE OF MICROELECTRONICS
Affiliation1.Hong Kong University of Science and Technology
2.Universidade de Macau
Recommended Citation
GB/T 7714
Wang B.,Law M.K.,Bermak A.. A low-cost capacitive relative humidity sensor for food moisture monitoring application[C],2012:95-99.
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