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Reception performance enhancement of capacitive micromachined ultrasonic transducers via modified membrane structures
Jiang X.; Yu Y.; Wang J.; Liu X.; Kin Che U.; Pun S.H.; Vai M.I.; Un Mak P.
2017
Conference Name16th International Conference on Biomedical Engineering (ICBME)
Source PublicationIFMBE Proceedings
Volume61
Pages109-114
Conference DateDEC 07-10, 2016
Conference PlaceSingapore, SINGAPORE
Abstract

This paper presents a method to enhance the reception performance of capacitive micromachined ultrasonic transducers (CMUTs) working in conventional mode and water immersion by adjusting the framework of vibrating membrane. The core conception of the enhancement is to reduce the system stiffness to improve both static membrane deflection under DC bias voltage and membrane displacement by harmonic analysis under acoustic pressure. Two modified structures of slotted membrane and corrugated membrane are presented respectively and the CMUT modeling is constructed and analyzed via finite element analysis (FEA) simulations by means of COMSOL Multiphysics. By using the modified membrane structures, FEA simulation shows that both the electromechanical coupling coefficient and receiving sensitivity are improved up to 20.9% and 50.5% for slotted membrane and 5.0% and 38.3% for corrugated membrane, respectively.

KeywordCmut Receiver Sensitivity Enhancement Slotted Membrane And Corrugated Membrane
DOIhttp://doi.org/10.1007/978-981-10-4220-1_21
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering
WOS SubjectEngineering, Biomedical
WOS IDWOS:000451583700021
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Document TypeConference paper
专题DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING
AffiliationUniversidade de Macau
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GB/T 7714
Jiang X.,Yu Y.,Wang J.,et al. Reception performance enhancement of capacitive micromachined ultrasonic transducers via modified membrane structures[C],2017:109-114.
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