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Design of a Collapse-Mode CMUT with an Embossed Membrane for Improving Output Pressure
Yu Y.1; Pun S.H.1; Mak P.U.1; Cheng C.-H.1,2; Wang J.1; Mak P.-I.1; Vai M.I.1
2016-06-01
Source PublicationIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
ISSN08853010
Volume63Issue:6Pages:854-863
Abstract

Capacitive micromachined ultrasonic transducers (CMUTs) have emerged as a competitive alternative to piezoelectric ultrasonic transducers, especially in medical ultrasound imaging and therapeutic ultrasound applications, which require high output pressure. However, as compared with piezoelectric ultrasonic transducers, the output pressure capability of CMUTs remains to be improved. In this paper, a novel structure is proposed by forming an embossed vibrating membrane on a CMUT cell operating in the collapse mode to increase the maximum output pressure. By using a beam model in undamped conditions and finite-element analysis simulations, the proposed embossed structure showed improvement on the maximum output pressure of the CMUT cell when the embossed pattern was placed on the estimated location of the peak deflection. As compared with a uniform membrane CMUT cell worked in the collapse mode, the proposed CMUT cell can yield the maximum output pressure by 51.1% and 88.1% enhancement with a single embossed pattern made of SiN and nickel, respectively. The maximum output pressures were improved by 34.9% (a single SiN embossed pattern) and 46.7% (a single nickel embossed pattern) with the uniform membrane when the center frequencies of both original and embossed CMUT designs were similar.

KeywordCapacitive Micromachined Ultrasonic Transducer (Cmut) Embossed Membrane Output Pressure
DOI10.1109/TUFFC.2016.2554612
URLView the original
Indexed BySCI
Language英语
WOS Research AreaAcoustics ; Engineering
WOS SubjectAcoustics ; Engineering, Electrical & Electronic
WOS IDWOS:000377498200005
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被引频次[WOS]:4   [WOS记录]     [WOS相关记录]
Document TypeJournal article
专题DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING
INSTITUTE OF MICROELECTRONICS
Affiliation1.Universidade de Macau
2.Hong Kong Polytechnic University
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Yu Y.,Pun S.H.,Mak P.U.,et al. Design of a Collapse-Mode CMUT with an Embossed Membrane for Improving Output Pressure[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,2016,63(6):854-863.
APA Yu Y..,Pun S.H..,Mak P.U..,Cheng C.-H..,Wang J..,...&Vai M.I..(2016).Design of a Collapse-Mode CMUT with an Embossed Membrane for Improving Output Pressure.IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,63(6),854-863.
MLA Yu Y.,et al."Design of a Collapse-Mode CMUT with an Embossed Membrane for Improving Output Pressure".IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 63.6(2016):854-863.
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