UM
Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer
Liang, Binghao; Chen, Wenjun; He, Zhongfu; Yang, Rongliang; Lin, Zhiqiang; Du, Huiwei; Shang, Yuanyuan; Cao, Anyuan; Tang, Zikang; Gui, Xuchun
2017-11-27
Source PublicationSMALL
ISSN1613-6810
Volume13Issue:44
AbstractPressure sensing is a crucial function for flexible and wearable electronics, such as artificial skin and health monitoring. Recent progress in material and device structure of pressure sensors has brought breakthroughs in flexibility, self-healing, and sensitivity. However, the fabrication process of many pressure sensors is too complicated and difficult to integrate with traditional silicon-based Micro-Electro-Mechanical System(MEMS). Here, this study demonstrates a scalable and integratable contact resistance-based pressure sensor based on a carbon nanotube conductive network and a photoresist insulation layer. The pressure sensors have high sensitivity (95.5 kPa(-1)), low sensing threshold (16 Pa), fast response speed (<16 ms), and zero power consumption when without loading pressure. The sensitivity, sensing threshold, and dynamic range are all tunable by conveniently modifying the hole diameter and thickness of insulation layer.
Keywordcarbon nanotubes contact resistance photoresist piezoresistive pressure sensor
DOI10.1002/smll.201702422
URLView the original
Indexed BySCI
Language英语
WOS Research AreaChemistry ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS SubjectChemistry, Multidisciplinary ; Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
WOS IDWOS:000416040600011
PublisherWILEY-V C H VERLAG GMBH
The Source to ArticleWOS
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Cited Times [WOS]:14   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionUniversity of Macau
Recommended Citation
GB/T 7714
Liang, Binghao,Chen, Wenjun,He, Zhongfu,et al. Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer[J]. SMALL,2017,13(44).
APA Liang, Binghao.,Chen, Wenjun.,He, Zhongfu.,Yang, Rongliang.,Lin, Zhiqiang.,...&Gui, Xuchun.(2017).Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer.SMALL,13(44).
MLA Liang, Binghao,et al."Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer".SMALL 13.44(2017).
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