Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer

doi:10.1002/smll.201702422

	Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer
	Liang, Binghao; Chen, Wenjun; He, Zhongfu; Yang, Rongliang; Lin, Zhiqiang; Du, Huiwei; Shang, Yuanyuan; Cao, Anyuan; Tang, Zikang; Gui, Xuchun
	2017-11-27
Source Publication	SMALL
ISSN	1613-6810
Volume	13 Issue:44
Abstract	Pressure sensing is a crucial function for flexible and wearable electronics, such as artificial skin and health monitoring. Recent progress in material and device structure of pressure sensors has brought breakthroughs in flexibility, self-healing, and sensitivity. However, the fabrication process of many pressure sensors is too complicated and difficult to integrate with traditional silicon-based Micro-Electro-Mechanical System(MEMS). Here, this study demonstrates a scalable and integratable contact resistance-based pressure sensor based on a carbon nanotube conductive network and a photoresist insulation layer. The pressure sensors have high sensitivity (95.5 kPa(-1)), low sensing threshold (16 Pa), fast response speed (<16 ms), and zero power consumption when without loading pressure. The sensitivity, sensing threshold, and dynamic range are all tunable by conveniently modifying the hole diameter and thickness of insulation layer.
Keyword	carbon nanotubes contact resistance photoresist piezoresistive pressure sensor
DOI	10.1002/smll.201702422
URL	View the original
Indexed By	SCI
Language	英语
WOS Research Area	Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS Subject	Chemistry, Multidisciplinary ; Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
WOS ID	WOS:000416040600011
Publisher	WILEY-V C H VERLAG GMBH
The Source to Article	WOS
Fulltext Access	View Full-Text via DOI View Full-Text via Web of Science
Citation statistics	Cited Times [WOS]:14 [WOS Record] [Related Records in WOS]
Document Type	Journal article
Collection	University of Macau
Recommended Citation GB/T 7714	Liang, Binghao,Chen, Wenjun,He, Zhongfu,et al. Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer[J]. SMALL,2017,13(44).
APA	Liang, Binghao.,Chen, Wenjun.,He, Zhongfu.,Yang, Rongliang.,Lin, Zhiqiang.,...&Gui, Xuchun.(2017).Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer.SMALL,13(44).
MLA	Liang, Binghao,et al."Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer".SMALL 13.44(2017).

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