| Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer | |
| Liang, Binghao; Chen, Wenjun; He, Zhongfu; Yang, Rongliang; Lin, Zhiqiang; Du, Huiwei; Shang, Yuanyuan; Cao, Anyuan; Tang, Zikang; Gui, Xuchun | |
| 2017-11-27 | |
| Source Publication | SMALL
 |
| ISSN | 1613-6810 |
| Volume | 13Issue:44 |
| Abstract | Pressure sensing is a crucial function for flexible and wearable electronics, such as artificial skin and health monitoring. Recent progress in material and device structure of pressure sensors has brought breakthroughs in flexibility, self-healing, and sensitivity. However, the fabrication process of many pressure sensors is too complicated and difficult to integrate with traditional silicon-based Micro-Electro-Mechanical System(MEMS). Here, this study demonstrates a scalable and integratable contact resistance-based pressure sensor based on a carbon nanotube conductive network and a photoresist insulation layer. The pressure sensors have high sensitivity (95.5 kPa(-1)), low sensing threshold (16 Pa), fast response speed (<16 ms), and zero power consumption when without loading pressure. The sensitivity, sensing threshold, and dynamic range are all tunable by conveniently modifying the hole diameter and thickness of insulation layer. |
| Keyword | carbon nanotubes contact resistance photoresist piezoresistive pressure sensor |
| DOI | 10.1002/smll.201702422 |
| URL | View the original |
| Indexed By | SCI |
| Language | 英语 |
| WOS Research Area | Chemistry ; Science & Technology - Other Topics ; Materials Science ; Physics |
| WOS Subject | Chemistry, Multidisciplinary ; Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter |
| WOS ID | WOS:000416040600011 |
| Publisher | WILEY-V C H VERLAG GMBH |
| The Source to Article | WOS |
| Fulltext Access | |
| Citation statistics | |
| Document Type | Journal article |
| Collection | University of Macau |
| Recommended Citation GB/T 7714 | Liang, Binghao,Chen, Wenjun,He, Zhongfu,et al. Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer[J]. SMALL,2017,13(44). |
| APA | Liang, Binghao.,Chen, Wenjun.,He, Zhongfu.,Yang, Rongliang.,Lin, Zhiqiang.,...&Gui, Xuchun.(2017).Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer.SMALL,13(44). |
| MLA | Liang, Binghao,et al."Highly Sensitive, Flexible MEMS Based Pressure Sensor with Photoresist Insulation Layer".SMALL 13.44(2017). |
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