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Design and Development of a Dual-Axis Force Sensing MEMS Microgripper
Yang, Sijie; Xu, Qingsong; Nan, Zhijie
2017-12
Source PublicationJOURNAL OF MECHANISMS AND ROBOTICS-TRANSACTIONS OF THE ASME
ISSN1942-4302
Volume9Issue:6
Abstract

This paper presents the design, simulation, fabrication, and testing processes of a new microelectromechanical systems (MEMS) microgripper, which integrates an electrostatic actuator and a capacitive force sensor. One advantage of the presented gripper is that the gripping force and interaction force in two orthogonal directions can be, respectively, detected by a single force sensor. The whole gripper structure consists of the left actuating part and right sensing part. It owns a simple structure and compact footprint. The actuator and sensor are fixed and linearly guided by four leaf flexures, respectively. The left arm of the gripper is driven through a lever amplification mechanism. By this structure, the displacement from the electrostatic actuator is transmitted and enlarged at the gripper tip. The right arm of the gripper is designed to detect the gripping and interaction forces using a capacitive sensor. The MEMS gripper is manufactured by SOIMUMPs process. The performance of the designed gripper is verified by conducting finite element analysis (FEA) simulation and experimental studies. Moreover, the demonstration of bio- cellulose gripping confirms the feasibility of the developed gripper device.

DOI10.1115/1.4038010
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering ; Robotics
WOS SubjectEngineering, Mechanical ; Robotics
WOS IDWOS:000414598900011
PublisherASME
The Source to ArticleWOS
Fulltext Access
Citation statistics
Cited Times [WOS]:6   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau,
First Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Yang, Sijie,Xu, Qingsong,Nan, Zhijie. Design and Development of a Dual-Axis Force Sensing MEMS Microgripper[J]. JOURNAL OF MECHANISMS AND ROBOTICS-TRANSACTIONS OF THE ASME,2017,9(6).
APA Yang, Sijie,Xu, Qingsong,&Nan, Zhijie.(2017).Design and Development of a Dual-Axis Force Sensing MEMS Microgripper.JOURNAL OF MECHANISMS AND ROBOTICS-TRANSACTIONS OF THE ASME,9(6).
MLA Yang, Sijie,et al."Design and Development of a Dual-Axis Force Sensing MEMS Microgripper".JOURNAL OF MECHANISMS AND ROBOTICS-TRANSACTIONS OF THE ASME 9.6(2017).
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