UM  > 微電子研究院
Adhesion promoter for a multi-dielectric-layer on a digital microfluidic chip
Jie Gao1; Tianlan Chen1; Cheng Dong1; Yanwei Jia1; Pui-In Mak1; Mang-I. Vai1; Rui P. Martins1,2
2015
Source PublicationRSC Advances
ISSN2046-2069
Volume5Issue:60Pages:48626-48630
Abstract

A silane-based adhesion promoter suitable for a multi-dielectric-layer coating on a digital microfluidic chip is reported. It measures >100× improvement in chip lifetime via transforming the bonding of the dielectric layers (Ta2O5 and Parylene C) from nonspecific to chemical. The refined chip-fabrication protocol also allows low EWOD actuation voltages down to 5 V.

DOIhttp://doi.org/10.1039/c5ra08202a
URLView the original
Indexed BySCI
Language英语
WOS Research AreaChemistry
WOS SubjectChemistry, Multidisciplinary
WOS IDWOS:000355738300058
Fulltext Access
Citation statistics
Cited Times [WOS]:4   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionINSTITUTE OF MICROELECTRONICS
Affiliation1.State Key Laboratory of Analog and Mixed-Signal VLSI and FST-ECE, University of Macau, Avenida da Universidade, Taipa, China
2.On leave from Instituto Superior Técnico, Universidade de Lisboa, Portugal
First Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Jie Gao,Tianlan Chen,Cheng Dong,et al. Adhesion promoter for a multi-dielectric-layer on a digital microfluidic chip[J]. RSC Advances,2015,5(60):48626-48630.
APA Jie Gao.,Tianlan Chen.,Cheng Dong.,Yanwei Jia.,Pui-In Mak.,...&Rui P. Martins.(2015).Adhesion promoter for a multi-dielectric-layer on a digital microfluidic chip.RSC Advances,5(60),48626-48630.
MLA Jie Gao,et al."Adhesion promoter for a multi-dielectric-layer on a digital microfluidic chip".RSC Advances 5.60(2015):48626-48630.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Jie Gao]'s Articles
[Tianlan Chen]'s Articles
[Cheng Dong]'s Articles
Baidu academic
Similar articles in Baidu academic
[Jie Gao]'s Articles
[Tianlan Chen]'s Articles
[Cheng Dong]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Jie Gao]'s Articles
[Tianlan Chen]'s Articles
[Cheng Dong]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.