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A 0.3-V, 37.5-nW 1.5∼6.5-pF-input-range supply voltage tolerant capacitive sensor readout
Su-Yan Fan1; Man-Kay Law1; Pui-In Mak1; Rui P. Martins1,2
2015
Conference Name14 International Symposium on Integrated Circuits (ISIC)
Source Publication2014 International Symposium on Integrated Circuits (ISIC)
Pages388-391
Conference DateDEC 10-12, 2014
Conference PlaceMarina Bay Sands, SINGAPORE
Abstract

A fully-digital capacitive sensor readout circuit based on capacitance controlled oscillators is presented. A two-step quantization scheme using SAR for coarse conversion and ΔΣ for fine conversion is introduced to extend the sensor input range while preserving the sensing accuracy. Systematic error analysis and optimization for the finite switch on-resistance and buffer input dependent delay are also outlined. Power supply insensitivity is ensured by the use of a pseudo-differential architecture and a ratiometric readout scheme. The complete sensor readout is implemented in a standard 0.18μm CMOS process. Simulation results show that the sensor readout circuit can achieve a wide input range from 1.5 to 6.5pF and a worst case power supply rejection ratio of 0.65% from 0.3V to 0.6V. For the ΔΣ conversion, a resolution of 7.4b at a conversion frequency of 318 Hz with an input capacitance of 4pF and a 0.3V supply is achieved. An average power is 37.5nW at 0.3V with a 4pF input capacitance, corresponding to a Figure-of-Merit (FoM) of 350fJ/conv-step.

DOIhttp://doi.org/10.1109/ISICIR.2014.7029516
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering
WOS SubjectEngineering, Electrical & Electronic
WOS IDWOS:000380456800080
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Citation statistics
Cited Times [WOS]:1   [WOS Record]     [Related Records in WOS]
Document TypeConference paper
CollectionINSTITUTE OF MICROELECTRONICS
DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING
Affiliation1.State-Key Laboratory of Analog and Mixed-Signal VLSI and FST-ECE, University of Macau, Macao, China.
2.on leave from Instituto Superior Técnico /Universidade de Lisboa, Portugal.
First Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Su-Yan Fan,Man-Kay Law,Pui-In Mak,et al. A 0.3-V, 37.5-nW 1.5∼6.5-pF-input-range supply voltage tolerant capacitive sensor readout[C],2015:388-391.
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