UM  > Faculty of Science and Technology  > DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Design and testing of a new 3-DOF spatial flexure parallel micropositioning stage
Zhang, Xiaozhi; Xu, Qingsong
2018-01
Source PublicationINTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
ISSN2234-7593
Volume19Issue:1Pages:109-118
Abstract

This paper presents the design and testing of a novel 3-DOF parallel flexure micropositioning stage for micro-scale operations. The proposed modular design can obtain the merit of high interchangeability during maintenance process. The output platform of the mechanism offers pure translational motion along X, Y, and Z axes by resorting to the flexure guiding of two parallelogram joints. Meanwhile, the output motion is decoupled by using two leaves with symmetric ellipse-shaped flexure hinges, and the platform provides isolated movement without parasitic motion. By using the bridge-type and lever-type compound amplifier, the micropositioning stage provides a large output displacement, which is over 30 times the input displacement provided by piezoelectric actuator. The enlarged displacement is translated to the orthogonal parallel mechanism by four straight beams, which provide perfect decoupling properties. In addition, the modular design principle makes it possible to adopt multiple materials to balance the performance of the actuator and decoupling flexure hinges. Analytical analysis and finite element analysis simulation are conducted to verify the fine decoupling property and large translational motion of the proposed 3-DOF parallel micropositioning stage. Moreover, a prototype is fabricated using multiple materials for experimental testing. Results demonstrate the promising performance of the developed decoupled micropositioning stage.

KeywordSpatial Flexure Hinges Compound Displacement Amplifier 3-dof Parallel Mechanism Micropositioning Stage
DOI10.1007/s12541-018-0013-3
URLView the original
Indexed BySCI
Language英语
WOS Research AreaEngineering
WOS SubjectEngineering, Manufacturing ; Engineering, Mechanical
WOS IDWOS:000419710800013
PublisherKOREAN SOC PRECISION ENG
The Source to ArticleWOS
Fulltext Access
Citation statistics
Cited Times [WOS]:19   [WOS Record]     [Related Records in WOS]
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and TechnologyUniversity of MacauTaipa, MacauChina
First Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Zhang, Xiaozhi,Xu, Qingsong. Design and testing of a new 3-DOF spatial flexure parallel micropositioning stage[J]. INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING,2018,19(1):109-118.
APA Zhang, Xiaozhi,&Xu, Qingsong.(2018).Design and testing of a new 3-DOF spatial flexure parallel micropositioning stage.INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING,19(1),109-118.
MLA Zhang, Xiaozhi,et al."Design and testing of a new 3-DOF spatial flexure parallel micropositioning stage".INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING 19.1(2018):109-118.
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